Journal of the Korea Society of Computer and Information (한국컴퓨터정보학회논문지)

Korean Society of Computer Information (한국컴퓨터정보학회)
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A Study on UBM Method Detecting Mean Shift in Autocorrelated Process Control

  • Jun, Sang-Pyo (College of General Education, Namseoul Unversity)
  • Received : 2020.10.23
  • Accepted : 2020.11.24
  • Published : 2020.12.31
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Abstract

In today's process-oriented industries, such as semiconductor and petrochemical processes, autocorrelation exists between observed data. As a management method for the process where autocorrelation exists, a method of using the observations is to construct a batch so that the batch mean approaches to independence, or to apply the EWMA (Exponentially Weighted Moving Average) statistic of the observed value to the EWMA control chart. In this paper, we propose a method to determine the batch size of UBM (Unweighted Batch Mean), which is commonly used as a management method for observations, and a method to determine the optimal batch size based on ARL (Average Run Length) We propose a method to estimate the standard deviation of the process. We propose an improved control chart for processes in which autocorrelation exists.

오늘날 반도체나 석유 화학 공정과 같이 프로세스 중심의 산업에서는 관측된 자료들 사이에 자기 상관이 존재한다. 자기상관이 존재하는 공정에 대한 관리 방법으로는 관측치를 이용하여 뱃치 평균이 독립에 가까워지도록 뱃치를 구성하여 관리하거나, 관측치의 EWMA (지수 가중치 이동 평균) 통계량을 EWMA 관리도에 적용하는 방법등이 주로 사용되고 있다. 본 논문에서는 관찰치에 대한 관리 방법으로 일반적으로 사용되는 UBM 의 뱃치 크기를 결정하는 방법을 소개하고, ARL(평균 실행 길이)을 기반으로 최적 뱃치 크기를 정하는 방법과 그러한 뱃치 구성에서 공정의 표준 편차를 추정하는 방법을 제안 한다. 자기상관이 존재하는 공정에 대한 개선된 관리도를 제안하고자 한다.

Keywords

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