Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on Attractive Force Characteristics of Glass Substrate Using Alumina Electrostatic Chuck by Finite Element Analysis

유한요소해석을 이용한 알루미나 정전척의 글라스 기판 흡착 특성 연구

  • 이재영 (한국기술교육대학교대학원 메카트로닉스공학과) ;
  • 장경민 (한국기술교육대학교 산학협력단) ;
  • 민동균 (한국기술교육대학교 메카트로닉스공학부) ;
  • 강재규 ((주)선익시스템) ;
  • 성기현 ((주)선익시스템) ;
  • 김혜동 ((주)선익시스템)
  • Received : 2020.11.12
  • Accepted : 2020.12.08
  • Published : 2020.12.31
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Abstract

In this research, the attractive force of Coulomb type electrostatic chuck(ESC), which consisted of alumina dielectric, on glass substrate was studied by using the finite element analysis. The attractive force is caused by the high electrical resistance which occurs in contact region between glass substrate and dielectric layer. This research tries the simple geometrical modeling of ESC and glass substrate with air gap. The influences of the applied voltage, and air gap are investigated. When alumina dielectric with 1014 Ω·cm, 1.5 kV voltage, and 0.01 mm air gap were applied, electrostatic force in this work reached to 4 gf/㎠. This results show that the modeling of air gap is essential to derive the attractive force of the ESC.

Keywords

References

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