Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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Multicomponent IGZO Ceramics for Transparent Electrode Target Fabricated from Oxides and Nitrates

산화물과 질산염으로 제조한 투명전극 타깃용 다성분계 IGZO 세라믹스

  • Lee, Hyun-Kwun (School of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Yoon, Ji-Hye (School of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Cho, Kyeong-Sik (School of Materials Science and Engineering, Kumoh National Institute of Technology)
  • 이현권 (금오공과대학교 신소재공학부) ;
  • 윤지혜 (금오공과대학교 신소재공학부) ;
  • 조경식 (금오공과대학교 신소재공학부)
  • Received : 2019.08.28
  • Accepted : 2019.09.30
  • Published : 2019.10.28
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Abstract

Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were $In_2O_3:Ga_2O_3:ZnO$ = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at $1200^{\circ}C$ results in the formation of $InGaZnO_4$, $InGaZn_3O_6$, and $InGaZn_5O_8$ phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at $1450^{\circ}C$ for 12 h. The $InGaZn_3O_6$ ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.

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