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Multicomponent IGZO Ceramics for Transparent Electrode Target Fabricated from Oxides and Nitrates

산화물과 질산염으로 제조한 투명전극 타깃용 다성분계 IGZO 세라믹스

  • Lee, Hyun-Kwun (School of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Yoon, Ji-Hye (School of Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Cho, Kyeong-Sik (School of Materials Science and Engineering, Kumoh National Institute of Technology)
  • 이현권 (금오공과대학교 신소재공학부) ;
  • 윤지혜 (금오공과대학교 신소재공학부) ;
  • 조경식 (금오공과대학교 신소재공학부)
  • Received : 2019.08.28
  • Accepted : 2019.09.30
  • Published : 2019.10.28

Abstract

Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were $In_2O_3:Ga_2O_3:ZnO$ = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at $1200^{\circ}C$ results in the formation of $InGaZnO_4$, $InGaZn_3O_6$, and $InGaZn_5O_8$ phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at $1450^{\circ}C$ for 12 h. The $InGaZn_3O_6$ ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.

Keywords

References

  1. K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano and H. Hosono: Science, 300 (2003) 1269. https://doi.org/10.1126/science.1083212
  2. S.-H. K. Park, C.-S. Hwang, M. Ryu, S. Yang, C. Byun, J. Shin, J.-I. Lee, K. Lee, M. S. Oh and S. Im: Adv. Mater., 21 (2009) 678. https://doi.org/10.1002/adma.200801470
  3. K. Myny: Nat. Electron., 1 (2018) 30. https://doi.org/10.1038/s41928-017-0008-6
  4. C.-Y. Chen and J. Kanicki: IEEE Electron Device Lett., 17 (1996) 437. https://doi.org/10.1109/55.536285
  5. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano and H. Hosono: Nature, 432 (2004) 488. https://doi.org/10.1038/nature03090
  6. J. S. Park, W.-J. Maeng, H.-S. Kim and J.-S. Park: Thin Solid Films, 520 (2012) 1679. https://doi.org/10.1016/j.tsf.2011.07.018
  7. D. P. Notron: Mater. Sci. Eng., R, 43 (2004) 139. https://doi.org/10.1016/j.mser.2003.12.002
  8. H. Q. Chiang, J. F. Wagger, R. L. Hoffman, J. Joeng and D. A. Keszler: Appl. Phys. Lett., 86 (2005) 013503. https://doi.org/10.1063/1.1843286
  9. G. Lavareda, C. Nunes de Carvalho, E. Fortunato, A. R. Ramos, E. Alves, O. Conde and A. Amaral: J. Non-Cryst. Solids, 352 (2006) 2311. https://doi.org/10.1016/j.jnoncrysol.2006.03.031
  10. K. Matsuzaki, H. Hiramatsu, K. Nomura, H. Yanagi, T. Kamiya, M. Hiranob and H. Hosono: Thin Solid Films, 496 (2006) 37. https://doi.org/10.1016/j.tsf.2005.08.187
  11. R. E. Presley, C. L. Munsee, C.-H. Park, D. Hong, J. F. Wager and D. A. Keszler: J. Phys. D: Appl. Phys., 37 (2004) 2810. https://doi.org/10.1088/0022-3727/37/20/006
  12. T. Iwasaki, N. Itagaki, T. Den, H. Kumomi, K. Komura, T. Kamiya and H. Hosono: Appl. Phys Lett, 90 (2007) 242114. https://doi.org/10.1063/1.2749177
  13. H. Kumomi, K. Komura, T. Kamiya and H. Hosono: Thin Solid Films, 516 (2008) 1516. https://doi.org/10.1016/j.tsf.2007.03.161
  14. N. Itagaki, T. Iwasaki, H. Kumomi, T. Den, K. Nomura, T. Kamiya and H. Hosono: Phys. Status Solidi A, 205 (2008) 1915. https://doi.org/10.1002/pssa.200778909
  15. M. Ito, C. Miyazaki, M. Ishizaki, M. Kon, N. Ikeda, T. Okubo, R. Matsubara, K. Hatta, Y. Ugajin and N. Sekine: J. Non-Cryst. Solids, 354 (2008) 2777. https://doi.org/10.1016/j.jnoncrysol.2007.10.083
  16. C. Wu, X. Huang, H. Lu, G. Yu, F. Ren, D. Chen, R. Zhang and Y. Zheng: Solid- State Electron., 109 (2015) 37. https://doi.org/10.1016/j.sse.2015.03.011
  17. S. H. Jin, S. K. Kang, I. T. Cho, S. Y. Han, H. U. Chung, D. J. Lee, J. Shin, G. W. Baek, T. I. Kim, J.-H. Lee and J. A. Rogers: ACS Appl. Mater. Interfaces, 7 (2015) 8268. https://doi.org/10.1021/acsami.5b00086
  18. Y. C. Zhang, G. He, C. Zhang, L. Zhu, B. Yang, Q. B. Lin and X. S. Jiang: J. Alloys Compd., 765 (2018) 791. https://doi.org/10.1016/j.jallcom.2018.06.294
  19. S. An, M. Mativenga, Y. Kim and J. Jin: Appl. Phys. Lett., 105 (2014) 053507. https://doi.org/10.1063/1.4892541
  20. J. Chen, J. Zhong, W. Luo, C. Qi, B. Sun, S. Liu, B. Liu, Y. Shu and J. He: J. Alloys Compd., 800 (2019) 468. https://doi.org/10.1016/j.jallcom.2019.06.031
  21. M.-W. Wu, P.-H. Lai, C.-H. Hong and F.-C. Chou: J. Eur. Ceram. Soc., 34 (2014) 3715. https://doi.org/10.1016/j.jeurceramsoc.2014.05.022
  22. C.-C. Lo and T.-E. Hsieh: Ceram. Int., 38 (2012) 3977. https://doi.org/10.1016/j.ceramint.2012.01.052
  23. M.-W. Wu, S.-H. Chang, W.-M. Chaung and H.-S. Huang: J. Eur. Ceram. Soc., 35 (2015) 3893. https://doi.org/10.1016/j.jeurceramsoc.2015.06.029
  24. M. Xiaobo, Z. Weijia, W. Dongxin, S. Benshuang and Z. Jingming: Rare Met. Mater. Eng., 44 (2015) 2937. https://doi.org/10.1016/S1875-5372(16)60026-7
  25. J. Liu, W. Zhang, D. Song, Q. Ma, L. Zhang, H. Zhang, L. Zhang and R. Wu: J. Alloys Compd., 575 (2013) 174. https://doi.org/10.1016/j.jallcom.2013.04.075
  26. M.-W. Wu: Ceram. Int., 38 (2012) 6229. https://doi.org/10.1016/j.ceramint.2012.04.076
  27. Y. Liu, Y. Zhang, C. Qiu, C. Qi, B. Sun, X. Zeng, J. Zhu, Y. Shu and J. He: Ceram. Int., 45 (2019) 4381. https://doi.org/10.1016/j.ceramint.2018.11.113
  28. S. Yuvaraj, F. Y. Lin, T.-H. Chang and C.-T. Yeh: J. Phys. Chem. B, 107 (2003) 1044. https://doi.org/10.1021/jp026961c
  29. Y. H. Kang, S. Jeong, J. M. Ko, J.-Y. Lee, Y. Choi, C. Lee and S. Y. Cho: J. Mater. Chem. C, 2 (2014) 4247. https://doi.org/10.1039/C4TC00139G
  30. W. Xu, H. Cao, L. Liang and J.-B. Xu: ACS Appl. Mater. Interfaces, 7 (2015) 14720. https://doi.org/10.1021/acsami.5b02451
  31. J.-Y. Jung, S.-H. Kim, E.-T. Kang, K.-S. Han, J.-H. Kim, K.-T. Hwang and W.-S. Cho: J. Korean Ceram. Soc., 51 (2014) 156. https://doi.org/10.4191/kcers.2014.51.3.156
  32. N. Fukuda, Y. Watanabe, S. Uemura, Y. Yoshida, T. Nakamura and H. Ushijima: J. Mater. Chem. C, 2 (2014) 2448. https://doi.org/10.1039/c3tc31944j
  33. A. C. Tas, P. J. Majewski and F. Aldinger: J. Am. Ceram. Soc., 85 (2002) 1421. https://doi.org/10.1111/j.1151-2916.2002.tb00291.x
  34. T. Omata, M. Kita, H. Okada, S. O.-Y. Matsuo, N. Ono and H. Ikawa: Thin Solid Films, 503 (2006) 22. https://doi.org/10.1016/j.tsf.2005.09.200
  35. Y. Liu, Y. Shu, X. Zeng, B. Sun, P. Liang, Y. Zhang, C. Qiu, J. Yi and J. He: Int. J. Appl. Ceram. Technol., 16 (2019) 585. https://doi.org/10.1111/ijac.13100
  36. C. Liu, J. Liu and Y. Wang: Rare Met., 30 (2011) 126. https://doi.org/10.1007/s12598-011-0253-1