한국산업보건학회지 (Journal of Korean Society of Occupational and Environmental Hygiene)

  • 제29권3호
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  • Pages.310-321
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  • 2019
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  • 2384-132X(pISSN)
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  • 2289-0564(eISSN)
한국산업보건학회 (Korean Industrial Hygiene Association)
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LCD 제조공정에서 사용되는 화학물질의 종류 및 특성

Types & Characteristics of Chemical Substances used in the LCD Panel Manufacturing Process

  • 박승현 (한국산업안전보건공단 산업안전보건연구원) ;
  • 박해동 (한국산업안전보건공단 산업안전보건연구원) ;
  • 노지원 (한국산업안전보건공단 산업안전보건연구원)
  • Park, Seung-Hyun (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency) ;
  • Park, Hae Dong (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency) ;
  • Ro, Jiwon (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency)
  • 투고 : 2019.07.17
  • 심사 : 2019.09.15
  • 발행 : 2019.09.30
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초록

Objectives: The purpose of this study was to investigate types and characteristics of chemical substances used in LCD(Liquid crystal display) panel manufacturing process. Methods: The LCD panel manufacturing process is divided into the fabrication(fab) process and module process. The use of chemical substances by process was investigated at four fab processes and two module processes at two domestic TFT-LCD(Thin film transistor-Liquid crystal display) panel manufacturing sites. Results: LCD panels are manufactured through various unit processes such as sputtering, chemical vapor deposition(CVD), etching, and photolithography, and a range of chemicals are used in each process. Metal target materials including copper, aluminum, and indium tin oxide are used in the sputtering process, and gaseous materials such as phosphine, silane, and chlorine are used in CVD and dry etching processes. Inorganic acids such as hydrofluoric acid, nitric acid and sulfuric acid are used in wet etching process, and photoresist and developer are used in photolithography process. Chemical substances for the alignment of liquid crystal, such as polyimides, liquid crystals, and sealants are used in a liquid crystal process. Adhesives and hardeners for adhesion of driver IC and printed circuit board(PCB) to the LCD panel are used in the module process. Conclusions: LCD panels are produced through dozens of unit processes using various types of chemical substances in clean room facilities. Hazardous substances such as organic solvents, reactive gases, irritants, and toxic substances are used in the manufacturing processes, but periodic workplace monitoring applies only to certain chemical substances by law. Therefore, efforts should be made to minimize worker exposure to chemical substances used in LCD panel manufacturing process.

키워드

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