Information Display (인포메이션 디스플레이)

The Korean Infomation Display Society (한국정보디스플레이학회)
권호 표지

태양 전지 제조 분야에서의 플라즈마 공정 활용

  • 안승규 (한국에너지기술연구원 신재생에너지연구소 태양광연구실)
  • Published : 2019.12.31
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References

  1. M. A. Lieberman and A. J. Lichtenberg, "Principles of plasma discharges and materials processing", John Wiley & Sons, (2005).
  2. Z. Machala, K. Hensel, and Y. Akishev, "Plasma for bio-decontamination, medicine and food security", Springer Science & Business Media, (2012).
  3. M. A. Green, "Solar cells: operating principles, technology, and system applications." Englewood Cliffs, NJ, Prentice-Hall, Inc. (1982).
  4. N. G. Park, Materials today 18(2), 65 (2015). https://doi.org/10.1016/j.mattod.2014.07.007
  5. W. J. Yin, J. H. Yang, J. Kang, Y. Yan and S. H. Wei, Journal of Materials Chemistry A 3(17), 8926 (2015). https://doi.org/10.1039/C4TA05033A
  6. K. Yoshikawa, H. Kawasaki, W. Yoshida, T. Irie, K. Konishi, K. Nakano and K. Yamamoto, Nature Energy 2(5), 17032 (2017). https://doi.org/10.1038/nenergy.2017.32
  7. A. Richter, J. Benick, F. Feldmann, A. Fell, M. Hermle and S. W. Glunz, Solar Energy Materials and Solar Cells 173, 96 (2017). https://doi.org/10.1016/j.solmat.2017.05.042
  8. H. Sai, T. Matsui and K. Matsubara, Applied Physics Letters 109(18), 183506 (2016). https://doi.org/10.1063/1.4966996
  9. M. Nakamura, K. Yamaguchi, Y. Kimoto, Y. Yasaki, T. Kato and H. Sugimoto, 46th IEEE PVSC, Chicago (2019).
  10. W. Wang, M. T. Winkler, O. Gunawan, T. Gokmen, T. K. Todorov, Y. Zhu and D. B. Mitzi, Advanced Energy Materials 4(7), 1301465 (2014). https://doi.org/10.1002/aenm.201301465
  11. J. Britt and C. Ferekides, Applied physics letters 62(22), 2851 (1993). https://doi.org/10.1063/1.109629
  12. J. F. Geisz, M. A. Steiner, N. Jain, K. L. Schulte, R. M. France, W. E. McMahon and D. J. Friedman, IEEE Journal of Photovoltaics 8(2), 626 (2017). https://doi.org/10.1109/jphotov.2017.2778567
  13. K. Sasaki, T. Agui, K. Nakaido, R. Onitsuka and T. Takamoto, 9th International Conference on Concentrating Photovoltaics Systems, Miyazaki, Japan (2013).
  14. M. A. Green, E. D. Dunlop, D. H. Levi, J. Hohl-Ebinger, M. Yoshita and A. W. Y. Ho-Baillie, Progress in Photovoltaics; Research & Applications 27, 565 (2019).
  15. M. A. Green, A. Ho-Baillie and H. J. Snaith, Nature photonics 8(7), 506 (2014). https://doi.org/10.1038/nphoton.2014.134
  16. E. H. Jung, N.J. Jeon, E. Y. Park, C. S. Moon, T. J. Shin, T. Y. Yang and J. Seo, Nature 567(7749), 511 (2019). https://doi.org/10.1038/s41586-019-1036-3
  17. R. Komiya, A. Fukui, N. Murofushi, N. Koide, R. Yamanaka and H. Katayama, Technical Digest, 21st International Photovoltaic Science and Engineering Conference, pp. 2C-50 (2011).
  18. S. Dong, K. Zhang, B. Xie, J. Xiao, H. L. Yip, H. Yan and Y. Cao, Advanced Energy Materials 9(1), 1802832 (2019). https://doi.org/10.1002/aenm.201802832
  19. G. Zhang, J. Zhao, P. C. Chow, K. Jiang, J. Zhang, Z. Zhu and H. Yan, Chemical reviews 118(7), 3447 (2018). https://doi.org/10.1021/acs.chemrev.7b00535
  20. K. Fukui, Y. Inomata and K Shirasawa, 26th IEEE Photovoltaic specialists Conference 1451, 47 (1997).
  21. J . Rentsch, G. Emanuel, C. Schetter, T. Aumann, D. Theirich, J. Gentischer, K. Roth, M. Fritzsche, K.-H. Dittrich and R. Preu, Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan (2003).
  22. J. Rentsch, F. Binaie, C. Schetter, H. Schlemm, K. Roth, D. Theirich and R. Preu, Proc. 19th PVSEC, Paris (2004).
  23. M. Heintze, A. Hauser, R. Moller, H. Wanka, E. Lopez, I. Dani and A. Huwe, 4th IEEE World Conference on Photovoltaic Energy Conference 1, 1119, (2006).
  24. M. A. Martinez and C. Guillen, Journal of materials processing technology 143, 326, (2003).
  25. Z. H. Li, E. S. Cho and S. J. Kwon, Applied surface science 257(22), 9682, (2011). https://doi.org/10.1016/j.apsusc.2011.06.101
  26. M. A. Mughal, R. Engelken and R. Sharma, Solar Energy 120, 131, (2015). https://doi.org/10.1016/j.solener.2015.07.028
  27. W. E. Spear and P. G. LeComber, Solid state communications 17(9), 1193, (1975). https://doi.org/10.1016/0038-1098(75)90284-7
  28. R. E. Schropp and M. Zeman, "Amorphous and microcrystalline silicon solar cells: modeling, materials and device technology" Kluwer Academic Publishers, (1998).
  29. J. Yang, A. Banerjee, T. Glatfelter, K. Hoffman, X. Xu and S. Guha, 1st World Conference on Photovoltaic Energy Conversion, Hawaii, USA (1994).
  30. A. Shah, E. Moulin and C. Ballif, Solar Energy Materials and Solar Cells 119, 311 (2013). https://doi.org/10.1016/j.solmat.2013.09.001
  31. R. E. Schropp, R. Carius and G. Beaucarne, MRS bulletin 32(3), 219 (2007). https://doi.org/10.1557/mrs2007.25
  32. A. Terakawa, Solar Energy Materials and Solar Cells 119, 204, (2013). https://doi.org/10.1016/j.solmat.2013.06.044
  33. D. Feldman, G. Barbose, R. Margolis, M. Bolinger, D. Chung, R. Fu and R. Wiser, "Photovoltaic System Pricing Trends: Historical, Recent, and Near-Term Projections 2015 Edition", Lawrence Berkeley National Laboratory, (2015).