반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

나노 다이아몬드 코팅박막의 기계적 특성 평가를 위한 계측시스템의 개발

Development of the Measurement System for Evaluating Mechanical Properties of Nano-diamond Coated Film

  • 권현규 (금오공과대학교 기계시스템공학과) ;
  • 이소진 (금오공과대학교 기계시스템공학과) ;
  • 권용민 (금오공과대학교 기계시스템공학과)
  • Kweon, Hyun Kyu (Department of Mechanical System, Kumoh National Institute of Technology) ;
  • Lee, So Jin (Department of Mechanical System, Kumoh National Institute of Technology) ;
  • Kweon, Yong Min (Department of Mechanical System, Kumoh National Institute of Technology)
  • 투고 : 2019.02.07
  • 심사 : 2019.03.17
  • 발행 : 2019.03.31
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초록

In this study, a new adhesion evaluating equipment and data processing methods were developed to overcome some limitations of existing evaluating equipment. Nano-diamond coated tool is a specimen of experiment. When applying frictional force and shear force on the specimen by a rotating polishing pad, delamination occurs at a moment. During each experiment, the vibration, load, and torque is obtained by accelerometer, loadcell and torque s+ kpensor. Frictional force and coefficient of friction are obtained by calculating torque and load. Based on FFT transformation, acceleration is processed and analyzed. As a result, the moment of delamination and the load at that time can be detected by the new developed equipment and measurement system. Finally, we call this load as an Adhesion force.

키워드

참고문헌

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