Fig. 1. Schematic image of typical piezoelectric ultrasonic transmitter with a cone.
Fig. 2. (a) Schematic image of the fabricated multilayer piezoelectric ceramic ultrasonic transmitter, (b) cross-sectional FE-SEM image of the piezoelectric film, (c) top (left) and side (right) view images of the fabricated piezoelectric ultrasonic transducer.
Fig. 3. Experimental set up for measurement of acoustic properties of the piezoelectric ultrasonic transmitter.
Fig. 4. (a) Displacement spectra at 5 Vrms of the ultrasonic transmitters with piezoelectric element of the single layer (top) and the multilayer (bottom) and (b) bending of the Al diaphragm at the resonant frequency for the multilayer piezoelectric ultrasonic transmitter.
Fig. 5. (a) AFM topography images of the top surface and (b) measured roughness profiles of Al diaphragm before and after surface roughness treatment.
Fig. 6. Impedance and phase angle characteristics of the ultrasonic transmitters for the piezoelectric ceramics with (a) a single layer and (b) multilayer from 30 kHz to 50 kHz.
Fig. 7. (a) Frequency dependant sound pressure level of the ultrasonic transmitters for the piezoelectric ceramics with a single layer and multilayer and (b) variation of sound pressure level dependant on applied voltage for the surface roughness treated multilayer piezoelectric ultrasonic transmitter from 35 kHz to 45 kHz.
Table 1. Comparison of acoustic performance between the commercial ultrasonic piezoelectric transmitter and the fabricated flat-type multilayer piezoelectric ceramic ultrasonic transmitter in this work.
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