Fig. 1 Principle of optical beam steering using siliconbased grating structure. (a) Principle of 1-dimensional beam steering in the longitudinal θ axis. (b) transverse ψ axis. (c) 2-dimensional beam steering using arrayed grating structures.
Fig. 2 Cross-sectional schematic of a silicon-based grating structure and corresponding beam radiation.
Fig. 3 Peak radiation angle θP as a function of wavelength in a single grating structure.
Fig. 4 Normalized intensity of a beam as a function of radiation angle at 1575-nm wavelength.
Fig. 5 Radiation efficiency(square maker) and FWHM ( δθFWHM', circle maker) as function of wavelength.
Fig. 6 Cross-sectional schematic of a silicon-based grating structure integrated with distributed Bragg reflector(DBR) layers.
Fig. 7 Radiation efficiency(square maker) and FWHM (δθFWHM', circle maker) as function of grating-DBR distance( DR ) of a grating structure integrated with DBR.
Fig. 8 Radiation efficiency(square maker) and FWHM (δθFWHM', circle maker) as function of wavelength fixed DR is 800 nm.
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