한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제52권6호
  • /
  • Pages.289-292
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  • 2019
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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Effect of a ZnO Buffer Layer on the Structural, Optical and Electrical Properties of TIO/ZnO Bi-layered Films

  • Choe, Su-Hyeon (School of Materials Science and Engineering, University of Ulsan) ;
  • Park, Yun-Je (School of Materials Science and Engineering, University of Ulsan) ;
  • Choi, Jin-Young (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2019.09.23
  • 심사 : 2019.11.19
  • 발행 : 2019.12.31
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초록

Transparent and conducting titanium doped indium oxide (TIO) thin films were deposited by RF magnetron sputtering on zinc oxide (ZnO)-coated glass substrates to investigate the effect of the ZnO buffer layer on optical and electrical properties of TIO/ZnO bi-layered films. TIO 90 nm / ZnO 10 nm films having a lower resistivity (3.09×10-3 Ωcm) and a higher visible transmittance (80.3%) than other TIO/ZnO films were prepared in this study. Figure of merit results indicate that a 10 nm thick ZnO thin film is an effective buffer layer that enhances optical transmittance and electrical conductivity of TIO films without intentional substrate heating or post-deposition annealing.

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참고문헌

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