Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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SCADA System for Semiconductor Equipment Condition Monitoring

반도체 장비상태 모니터링을 위한 SCADA 시스템 구현

  • Lee, Youn Ji (Department of Electronics Engineering, Myongji University) ;
  • Yun, Hak Jae (Department of Electronics Engineering, Myongji University) ;
  • Park, Hyoeun (Department of Electronics Engineering, Myongji University) ;
  • Hong, Sang Jeen (Department of Electronics Engineering, Myongji University)
  • 이윤지 (명지대학교 공과대학 전자공학과) ;
  • 윤학재 (명지대학교 공과대학 전자공학과) ;
  • 박효은 (명지대학교 공과대학 전자공학과) ;
  • 홍상진 (명지대학교 공과대학 전자공학과)
  • Received : 2019.12.07
  • Accepted : 2019.12.13
  • Published : 2019.12.31
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Abstract

Automation control and the data for control of industrial equipment for the diagnosis and prediction is a key to success in the 4th industrial revolution. It increases process efficiency and productivity through data collection, realtime monitoring, and the data analysis. However, university and research environment are still suffering from logging the data in manual way, and we occasionally loss the equipment data logging due to the lack of automatic data logging system. State variable presents the current condition of the equipment operation which is closely related to process result, and it is valuable to monitor and analyze the data for the equipment health monitoring. In this paper, we demonstrate the collection of equipment state variable data via programmable logic controller (PLC) and the visualization of the collected data over the Web access supervisory control and data acquisition (SCADA). Test vehicle for the implementation of the suggested SCADA system is a relay switched physical vapor deposition system in the university environment.

Keywords

References

  1. Xiongwen Zhang "Thermal Analysis of a Cylindrical Lithi-um-ion Battery", Journal of Electrochemical Acta 56, pp. 1246-1255, 2011. https://doi.org/10.1016/j.electacta.2010.10.054
  2. H. D. Song, S. S. Han, and S. H. Beack, "Analysis of Industry 4.0 Standard and Standardization of Smart Factory in Korea," Journal of Standards, Certification and Safety, 6(4), pp. 47-58, (2016).
  3. J. P. Park, "Analysis on Success Cases of Smart Factory in Korea: Leveraging from Large, Medium, and Small Size Enterprises," Journal of Digital Convergence, 15(5), pp. 107-115, (2017). https://doi.org/10.14400/JDC.2017.15.5.107
  4. H. S. Kim and D. G. Park, "Implementation of abnormal behavior detection system based packet analysis for industrial control system security," Journal of Korea Academia-Industrial cooperation Society, 19(4), pp. 47-56, (2018). https://doi.org/10.5762/KAIS.2018.19.4.47
  5. Y. S. Cho, S. M. Lee, H. J. Kim, and S. B. Kim, "Detection of Faulty Equipment Sequence of Multivariate Processes in Semiconductor Manufacturing," Journal of the Korean Institute of Industrial Engineers, 44(5), pp. 325-333, (2018). https://doi.org/10.7232/JKIIE.2018.44.5.325
  6. B. K. Sun, K. R. Han, K. W. Rim, "Study on Development of Embedded HMI System for PLC Monitoring," Journal of the Institute of Electronics Engineers of Korea, 42(4), pp. 1-10, (2005).