Nano

  • 제13권10호
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  • Pages.1850124.1-1850124.12
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  • 2018
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  • 1793-2920(pISSN)
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  • 1793-7094(eISSN)
성균관대학교 성균나노과학기술원 (SKKU Advanced Institute of Nano Technology)
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DOI QR코드

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The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD

  • Li, D. (College of Mechanical Engineering Yangzhou University) ;
  • Dai, S. (College of Mechanical Engineering Yangzhou University) ;
  • Goullet, A. (Institut des Materiaux Jean Rouxel (IMN)) ;
  • Granier, A. (Institut des Materiaux Jean Rouxel (IMN))
  • 투고 : 2018.07.17
  • 심사 : 2018.09.21
  • 발행 : 2018.10.31
⟨ 이전 논문 다음 논문 ⟩

초록

$TiO_2$ films were deposited from oxygen/titanium tetraisopropoxide (TTIP) plasmas at low temperature by Helicon-PECVD at floating potential ($V_f$) or substrate self-bias of -50 V. The influence of titanium precursor partial pressure on the morphology, nanostructure and optical properties was investigated. Low titanium partial pressure ([TTIP] < 0.013 Pa) was applied by controlling the TTIP flow rate which is introduced by its own vapor pressure, whereas higher titanium partial pressure was formed through increasing the flow rate by using a carrier gas (CG). Then the precursor partial pressures [TTIP+CG] = 0:027 Pa and 0.093 Pa were obtained. At $V_f$, all the films exhibit a columnar structure, but the degree of inhomogeneity is decreased with the precursor partial pressure. Phase transformation from anatase ([TTIP] < 0.013 Pa) to amorphous ([TTIP+CG] = 0:093 Pa) has been evidenced since the $O^+_2$ ion to neutral flux ratio in the plasma was decreased and more carbon contained in the film. However, in the case of -50 V, the related growth rate for different precursor partial pressures is slightly (~15%) decreased. The columnar morphology at [TTIP] < 0.013 Pa has been changed into a granular structure, but still homogeneous columns are observed for [TTIP+CG] = 0:027 Pa and 0.093 Pa. Rutile phase has been generated at [TTIP] < 0:013 Pa. Ellipsometry measurements were performed on the films deposited at -50 V; results show that the precursor addition from low to high levels leads to a decrease in refractive index.

키워드

과제정보

연구 과제 주관 기관 : National Natural Science Foundation of China

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