한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제31권7호
  • /
  • Pages.475-480
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  • 2018
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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비대칭 마그네트론 스퍼터로 증착된 비정질 탄소박막의 트라이볼로지 특성에서 CrC 삽입층 효과에 대한 연구

CrC Interlayer Effect on Tribological Properties of Amorphous Carbon Deposited by UBMS Method

  • 김필중 (조선이공대학교 전자과) ;
  • 박용섭 (조선이공대학교 전자과)
  • Kim, Phil Jung (Department of Electronics, Chosun College of Science and Technology) ;
  • Park, Yong Seob (Department of Electronics, Chosun College of Science and Technology)
  • 투고 : 2018.07.30
  • 심사 : 2018.08.23
  • 발행 : 2018.11.01
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초록

We investigated the tribological properties of amorphous carbon (a-C) films deposited with CrC interlayers of various thicknesses as the adhesive layer. A-C and CrC thin films were deposited using the unbalanced magnetron (UBM) sputtering method with graphite and chromium as the targets. CrC films as the interlayer were fabricated under a-C films, and various structural, surface, and tribological properties of a-C films deposited with various CrC interlayer thicknesses were investigated. With various CrC interlayer thicknesses under a-C films, the tribological properties of CrC/a-C films were improved; the increased film thickness exhibited a maximum high hardness of over 27.5 GPa, high elastic modulus of over 242 GPa, critical load of 31 N, residual stress of 1.85 GPa, and a smooth surface below 0.09 nm at the condition of 30-nm CrC thickness.

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