DOI QR코드

DOI QR Code

Three-Dimensional Measurements of the Specular Components by Using Direct Phase-Measuring Transmission Deflectometry

  • Na, Silin (Kanghae Precision System) ;
  • Shin, Sanghoon (Kanghae Precision System) ;
  • Kim, Doocheol (Department of Physics and Research Institute for Basic Sciences, Jeju National University) ;
  • Yu, Younghun (Department of Physics and Research Institute for Basic Sciences, Jeju National University)
  • Received : 2018.09.11
  • Accepted : 2018.10.29
  • Published : 2018.11.30

Abstract

We demonstrated transmission direct phase-measuring deflectometry (DPMD) with a specular phase object having discontinuous surfaces by using two displays and a two-dimensional array detector for display and by recording the distorted fringe patterns. Three-dimensional (3D) information was obtained by calculating the height map directly from the phase information. We developed a mathematical model of the phase-height relationship in transmission DPMD. Unlike normal transmission deflectometry, this method supports height measurement directly from the phase. Compared with other 3D measurement techniques such as interferometry, this method has the advantages of being inexpensive and easy to implement.

Keywords

Acknowledgement

Supported by : Jeju National University

References

  1. D. Malacara, Optical Shop Testing (Wiley Interscience, New York, 2007).
  2. X. Y. Su, W. Zhou, G. Bally and D. Vukicevik, Opt. Commun. 94, 561 (1992). https://doi.org/10.1016/0030-4018(92)90606-R
  3. R. Furutani, H. Asano, K. Takamasu and S. Ozono, Measurement 20, 129 (1997). https://doi.org/10.1016/S0263-2241(97)00026-2
  4. B. Denkena, H. Ahlers, F. Berg, Th. Wolf and H. K. Tonshoff, CIRP Ann. 51, 499 (2002). https://doi.org/10.1016/S0007-8506(07)61570-4
  5. H. Canabal and J. Alonso, Opt. Eng. 41, 822 (2002). https://doi.org/10.1117/1.1459055
  6. C. Quan, W. Chen and C. J. Tay, Opt. Lasers Eng. 48, 235 (2010). https://doi.org/10.1016/j.optlaseng.2009.06.013
  7. Y. K. Liu, X. Y. Su and Q. Y. Wu, Acta Optica Sinica 26, 1636 (2006)
  8. M. C. Knauer, J. Kaminski and G. Hausler, Proc. SPIE 5457, 366 (2004).
  9. M. Beyerlein, N. Lindlein and J. Schwider, Appl. Opt. 41, 2440 (2002). https://doi.org/10.1364/AO.41.002440
  10. Z. Liu, J. Gou, W. Shi, X. Huang and H. Xie, Opt. Lasers Eng. 65, 110 (2015). https://doi.org/10.1016/j.optlaseng.2014.06.015
  11. Z. Zhang, Y. Liu, S. Huang, Z. Niu and J. Guo et al., Proc. SPIE 10023, 100230X (2016).
  12. Y. Liu, S. Huang, Z. Zhang, N. Gao and F. Gao, Sci. Rep. 7, 10293 (2017). https://doi.org/10.1038/s41598-017-11014-5
  13. P. Zhao, N. Gao, Z. Zhang, F. Gao and X. Jiang, Opt. Lasers Eng. 103, 24 (2018). https://doi.org/10.1016/j.optlaseng.2017.11.008
  14. S. Huang, Y. Liy, N. Gao, Z. Zhang and F. Gao et al., Sensors 18, 144 (2018). https://doi.org/10.3390/s18010144
  15. Z. Zhang, Y. wang, S. Huang, Y. Liu and C. Chang et al., Sensors 17, 2835 (2017). https://doi.org/10.3390/s17122835
  16. D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping (John Wiley & Sons, New York, USA, 1998), Chap. 4.