E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)

  • 제31권5호
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  • Pages.25-31
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  • 2018
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  • 2982-6268(pISSN)
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  • 2982-6306(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

4H-SiC 기반으로 제작된 쇼트키 다이오드의 계면 준위 분석

  • 발행 : 2018.10.01
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초록

키워드

참고문헌

  1. H. Lin, POWER SiC 2017: MATERIALS, DEVICES, MODULES, AND APPLICATIONS, https://www.systemplus.fr/wp-content/uploads/2018/07/YD18027_Power_SiC_2018_Materials_Devices_Applications_July2018_Yole_Flyer.pdf (2018).
  2. T. Akiyama, A. Ito, K. Nakamura, T. Ito, H. Kageshima, M. Uematsu, and K. Shiraishi, Surf Sci., 641, 174 (2015). https://doi.org/10.1016/j.susc.2015.06.028
  3. S. A. Correa, C. Radtke, G. V. Soares, L. Miotti, I. J. R. Baumvol, S. Dimitrijev, J. Han, L. Hold, F. Kong, and F. C. Stedile, Appl. Phys. Lett., 94, 251909 (2009). https://doi.org/10.1063/1.3159812
  4. C. H. Kim, J. H. Moon, J. H. Yim, D. H. Lee, J. H. Lee, H. H. Lee, and H. J. Kim, Appl. Phys. Lett., 100, 082112 (2012). https://doi.org/10.1063/1.3689766
  5. D. H. Lee, C. H. Kim, H. H. Lee, S. H. Lee, H. J. Kang, H. w. Kim, H. K. Park, J. Y. Heo, and H. J. Kim, IEEE ELECTRON DEVICE LETTERS, 35, 868 (2014). https://doi.org/10.1109/LED.2014.2331316
  6. H. J. Kang, Ph. D. Impurity-related Interface States of 4H-SiC Schottky Diode Observed by Deep Level Transient Spectroscopy, Seoul National University, Seoul (2018).
  7. A. Cowley and S. Sze, J. Appl. Phys., 36, 3212 (1965). https://doi.org/10.1063/1.1702952
  8. C. Crowell and S. Alipanahi, Solid-State Electron., 24, 25 (1981). https://doi.org/10.1016/0038-1101(81)90209-4
  9. K. Kawahara, J. Suda, and T. Kimoto, J. Appl. Phys., 111, 053710 (2012). https://doi.org/10.1063/1.3692766
  10. C. H. Kim, S. H. Lee, J. H. Moon, J. R. Kim, H. H. Lee, H. J. Kang, H. W. Kim, J. Y. Heo, and H. J. Kim, ECS Solid State Lett., 4, N9 (2015). https://doi.org/10.1149/2.0021509ssl
  11. H. W. Kim, H. H. Lee, Y. S. Kim, S. H. Lee, H. J. Kang, and J. Y. Heo, Cryst. Eng. Comm., 19, 2359 (2017). https://doi.org/10.1039/C7CE00479F