참고문헌
- D.G. Howells, B.M. Henry, J. Madocks and H.E. Assender, Thin Solid Films 516, 3081 (2008). https://doi.org/10.1016/j.tsf.2007.11.017
- B.M. Henry, A.P. Roberts, C.R.M. Grovenor, A.P. Sutton and G.A.D. Briggs, 41st Annual Technical Conference Proceedings of the Society of Vacuum Coaters 434 (1998).
- H. Leplan, J.Y. Robie and Y. Pauleau, J. Appl. Phys. 79, 6926 (1996). https://doi.org/10.1063/1.361517
- E.G Rochow, Silicon and Silicones, 1987, Springer-Verlag, Berlin 181 (1987).
- S.J. Clarson and J.A. Semlyen (eds), Siloxane Polymers, (1993), Englewood Cliffs, N.J.:Prentice Hall
- B.J Aylett, Organometal. Chem. Rev. 3, 151 (1968).
- R.M. Laine, Y.D. Blum, D. Tse and R. Glaser, in Inorganic and Organometallic Polymers, ACS Symp. Ser. 360, 124 (1988).
- D. Seyferth, G.H. Wiseman and C. Prud'homme, J Am. Ceram. Soc. 66, C13 (1983).
- R.G. Jones, W Ando and J. Chojnowski, Silicon-Containing Polymers 323 (2000).
- H. Matsuo, M. Kokubo, T. Ohbayashi, Y. Tashiro, T. Suzuki, M. Kizaki, H. Hashimoto, Y. Shimizu, T. Sakurai and H. Aoki, U.S. Pat. No. 5747623, (1998).
- M. Pauckert, T. Vaahs and M. Brueck, Adv. Mater. 2, 398 (1990). https://doi.org/10.1002/adma.19900020903
- K.J. Wynne and R.W. Rice, Ann. Rev. Mater. Sci. 14, 297 (1984). https://doi.org/10.1146/annurev.ms.14.080184.001501
- R.M. Laine, Y.D. Blum, D. Tse and R. Glaser, in Inorganic and Organometallic Polymers, ACS Symposium Series 360. Edited by M. Zeldin, K.J. Wynne and H.R. Allcock. American Chemical Society 124 (1988).
- D. Seyferth, G.H. Wiseman, J.M. Schwark, Y.F. Yu, C.A. Poutasse, n Inorganic and Organometallic Polymers, ACS Symposium Series 360. Edited by M. Zeldin, K.J. Wynne and H.R. Allcock. American Chemical Society 143 (1988).
- G. Pouskouleli, Ceram. Int. 15, 213 (1989). https://doi.org/10.1016/0272-8842(89)90041-2
- W.H. Atwell, in Silicon Based Polymer Science, Advances in Chemistry Series 224, Edited by J.M. Zeigler and F.W.G. Fearon. American Chemical Society 593 (1990).
- J. Wan, M.J. Gaschand A. K. Mukherjee, J. Am. Ceram. Soc. 85, 554 (2002).
- H. Kozuka, K. Nakajima and H. Uchiyama, ACS Appl. Mater. Interfaces 5, 8329 (2013). https://doi.org/10.1021/am400845y
- C. R. Kruger and E. G. Rochow, J. Polym. Sci. A2, 3179 (1964).
- A Stock and K. Somiesky, Ber. Dtsch Chem. Ger 54, 740 (1921). https://doi.org/10.1002/cber.19210540424
- W. Fink, Angew. Chem. Int. Ed Engl 5, 760 (1966). https://doi.org/10.1002/anie.196607601
- R. Bhandavat, G. Singh, J Am. Chem. Soc. 95, 1536 (2012).
- R. Bhandavat, A. Feldman, C. Cromer, J. Lehman and G. Singh, ACS Appl. Mater. Interfaces 5, 2354 (2013). https://doi.org/10.1021/am302755x
- R.C.P. Cubbon, Rapra Technology Limited, 38 (2000).
- T. Kubo, E. Tadaoka, H. Kozuka, J Mater. Res. 19, 635 (2004). https://doi.org/10.1557/jmr.2004.19.2.635
- T. Kubo and H. Kozuka, J. Ceram. Soc. Jpn. 6, 517 (2006).
- H. Kozuka, M. Fujita, S. Tamoto, J. Sol-Gel Sci. Technol. 48, 148 (2008). https://doi.org/10.1007/s10971-008-1793-1
- J. Yesul, P. Christopher, K. Hyun-Gwan, P. Man-Young, K. Hongdoo, D. Lee-Mi, C. Michael, ACS Appl. Mater. Interfaces 8, 2061 (2016). https://doi.org/10.1021/acsami.5b10520
- Y. KOBAYASHI, H. YOKOTA, Y. FUCHITA, A. TAKAHASHI, Y. SUGAHARA, Journal of the Ceramic Society of Japan 121, 215 (2013). https://doi.org/10.2109/jcersj2.121.215
- T. Ohishi, Y. Yamazaki, Materials Sciences and Applications 8, 1 (2017). https://doi.org/10.4236/msa.2017.81001
- Y. Naganuma, T. Horiuchi, C. Kato and S. Tanaka, Surface & Coating Tech. 225, 40 (2013). https://doi.org/10.1016/j.surfcoat.2013.03.014
- Global Polysilazane Market Survey and Trend Research 2018, 99Strategy Market Research Department (2018).
- M. Kawasaki, S. Imazeki, T. Inoue and M. Ando, SID 06 DIGEST, P-2, 200 (2006).
- J. Yesul, P. Christopher, K. Hyun-Gwan, P. Man-Young, K. Hongdoo, D. Lee-Mi and C. Michael, ACS Appl. Mater. Interfaces 8, 2061 (2016). https://doi.org/10.1021/acsami.5b10520
- L. A. Liew, W. Zhang, L. An, S. Shah, R. Luo, Y. Liu, T. Cross, M. L. Dunn, V. Bright, J. W. Daily and R. Raj, American Ceramic Society Bulletin 80, 25 (2001).
- T. Cross, L. A. Liew, V. M. Bright, M. L. Dunn, J. W. Daily and R. Raj, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 172 (2002).
- C. J. Brinker, C. W. Scherer, The Physics and Chemistry of Sol-Gel-Processing, 279 (1989).
- R. Saito, S. Kobayashi and T. Hosoya, J. Appl. Polym. Sci. 97, 1835 (2005). https://doi.org/10.1002/app.21959
- 조성근.이재흥, 고분자 과학과 기술 27, 297 (2016).
- M. Birot, J.P. Pilot, J. Dunogues, Chem. Rev. 95, 1443 (1995). https://doi.org/10.1021/cr00037a014
- T. Konegger, L. F. Williams and R. K. Bordia, J. Am. Ceram. Soc. 98, 3047 (2015). https://doi.org/10.1111/jace.13758