Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Behavior of Plasma-doped Graphene upon High Temperature Vacuum Annealing

  • Lee, Byeong-Joo (Department of Advanced Materials Science and Engineering, Kangwon National University) ;
  • Jo, Sung-Il (Department of Advanced Materials Science and Engineering, Kangwon National University) ;
  • Jeong, Goo-Hwan (Department of Advanced Materials Science and Engineering, Kangwon National University)
  • Received : 2018.07.30
  • Accepted : 2018.09.29
  • Published : 2018.09.30
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Abstract

Herein, we present the behavior of plasma-doped graphene upon high-temperature vacuum annealing. An ammonia plasma-treated graphene sample underwent vacuum annealing for 1 h at temperatures ranging from 100 to $500^{\circ}C$. According to Raman analysis, the structural healing of the plasma-treated sample is more pronounced at elevated annealing temperatures. The crystallite size of the plasma-treated sample increases from 13.87 to 29.15 nm after vacuum annealing. In addition, the doping level by plasma treatment reaches $2.2{\times}10^{12}cm^{-2}$ and maintains a value of $1.6{\times}10^{12}cm^{-2}$, even after annealing at $500^{\circ}C$, indicating high doping stability. A relatively large decrease in the pyrrolic bonding components is observed by X-ray photoelectron spectroscopy as compared to other configurations, such as pyridinic and amino bindings, after the annealing. This study indicates that high-vacuum annealing at elevated temperatures provides a method for the structural reorganization of plasma-treated graphene without a subsequent decrease in doping level.

Keywords

Acknowledgement

Supported by : National Research Foundation of Korea (NRF)

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