디스플레이 및 일시 기능 소자에 적용된 산화물 기반 박막 트랜지스터

  • Published : 2018.03.31

Abstract

Oxide semiconductor has been spotlighted as a channel material of TFTs in AMLCD as an alternative to Si, due to high mobility ( > $5cm^2/Vs$). It is also one of the strong candidates for TFTs in AMOLED because of high bias stability at amorphous phase. Beyond the advantages mentioned above, oxide semiconductor has many strengths such as transparency, low fabrication temperature and relatively low fabrication cost. For those reasons, the application of oxide semiconductor is not limited to display but can be extended to new types of electronics, for example, transient electronics for human implantable devices. From this context, oxide materials that have been used as semiconductor and insulator at transient electronics are investigated respectively, and conductor and substrate candidates are also explained, since transient electronics require systematic consideration beyond individual oxide films.

Keywords

References

  1. J. Y. Kwon, D. J. Lee, K. B. Kim, "Review Paper: Transparent Amorphous Oxide Semiconductor Thin Film Transistor", Electron. Mater. Lett. 7 [1] 1 (2011). https://doi.org/10.1007/s13391-011-0301-x
  2. J. Y. Kwon, J. K. Jeong, "Recent progress in high performance and reliable n-type transition metal oxide-based thin film transistors", Semicond. Sci. Technol. 30 [2] (2015).
  3. S. W. Hwang, H. Tao, D. H. Kim, H. Y. Cheng, J. K. Song, E. Rill, M. A. Brenckle, B. Panilaitis, S. M. Won, Y. S. Kim, Y. M. Song, K. J. Yu, A. Ameen, R. Li, Y. W. Su, M. M. Yang, D. L. Kaplan, M. R. Zakin, M. J. Slepian, Y. G. Huang, F. G. Omenetto, J. A. Rogers, "A Physically Transient Form of Silicon Electronics", Science 337 [6102] 1640 (2012). https://doi.org/10.1126/science.1226325
  4. D. H. Kim, J. Viventi, J. J. Amsden, J. L. Xiao, L. Vigeland, Y. S. Kim, J. A. Blanco, B. Panilaitis, E. S. Frechette, D. Contreras, D. L. Kaplan, F. G. Omenetto, Y. G. Huang, K. C. Hwang, M. R. Zakin, B. Litt, J. A. Rogers, "Dissolvable films of silk fibroin for ultrathin conformal bio-integrated electronics", Nat. Mater. 9 [6] 511 (2010). https://doi.org/10.1038/nmat2745
  5. S. K. Kang, R. K. J. Murphy, S. W. Hwang, S. M. Lee, D. V. Harburg, N. A. Krueger, J. H. Shin, P. Gamble, H. Y. Cheng, S. Yu, Z. J. Liu, J. G. McCall, M. Stephen, H. Z. Ying, J. Kim, G. Park, R. C. Webb, C. H. Lee, S. J. Chung, D. S. Wie, A. D. Gujar, B. Vemulapalli, A. H. Kim, K. M. Lee, J. J. Cheng, Y. G. Huang, S. H. Lee, P. V. Braun, W. Z. Ray, J. A. Rogers, "Bioresorbable silicon electronic sensors for the brain", Nature 530 [7588] 71 (2016). https://doi.org/10.1038/nature16492
  6. K. J. Yu, D. Kuzum, S. W. Hwang, B. H. Kim, H. Juul, N. H. Kim, S. M. Won, K. Chiang, M. Trumpis, A. G. Richardson, H. Y. Cheng, H. Fang, M. Thompson, H. Bink, D. Talos, K. J. Seo, H. N. Lee, S. K. Kang, J. H. Kim, J. Y. Lee, Y. G. Huang, F. E. Jensen, M. A. Dichter, T. H. Lucas, J. Viventi, B. Litt, J. A. Rogers, "Bioresorbable silicon electronics for transient spatiotemporal mapping of electrical activity from the cerebral cortex", Nat. Mater. 15 [7] 782 (2016). https://doi.org/10.1038/nmat4624
  7. S. W. Hwang, C. H. Lee, H. Y. Cheng, J. W. Jeong, S. K. Kang, J. H. Kim, J. Shin, J. Yang, Z. J. Liu, G. A. Ameer, Y. G. Huang, J. A. Rogers, "Biodegradable Elastomers and Silicon Nanomembranes/Nanoribbons for Stretchable, Transient Electronics, and Biosensors", Nano Lett. 15 [5] 2801 (2015). https://doi.org/10.1021/nl503997m
  8. C. Dagdeviren, S. W. Hwang, Y. W. Su, S. Kim, H. Y. Cheng, O. Gur, R. Haney, F. G. Omenetto, Y. G. Huang, J. A. Rogers, "Transient, Biocompatible Electronics and Energy Harvesters Based on ZnO", Small 9 [20] 3398 (2013). https://doi.org/10.1002/smll.201300146
  9. S. W. Hwang, X. Huang, J. H. Seo, J. K. Song, S. Kim, S. Hage-Ali, H. J. Chung, H. Tao, F. G. Omenetto, Z. Q. Ma, J. A. Rogers, "Materials for Bioresorbable Radio Frequency Electronics", Adv. Mater. 25 [26] 3526 (2013). https://doi.org/10.1002/adma.201300920
  10. D.-H. Kim, Y.-S. Kim, J. Amsden, B. Panilaitis, D. L. Kaplan, F. G. Omenetto, M. R. Zakin, J. A. Rogers, "Silicon electronics on silk as a path to bioresorbable, implantable devices", Appl. Phys. Lett. 95 [13] (2009).
  11. S. W. Hwang, D. H. Kim, H. Tao, T. I. Kim, S. Kim, K. J. Yu, B. Panilaitis, J. W. Jeong, J. K. Song, F. G. Omenetto, J. A. Rogers, "Materials and Fabrication Processes for Transient and Bioresorbable High-Performance Electronics", Adv. Funct. Mater. 23 [33] 4087 (2013). https://doi.org/10.1002/adfm.201300127
  12. S.-W. Hwang, J.-K. Song, X. Huang, H. Cheng, S.-K. Kang, B. H. Kim, J.-H. Kim, S. Yu, Y. Huang, J. A. Rogers, "High-Performance Biodegradable/Transient Electronics on Biodegradable Polymers", Adv. Mater. 26 [23] 3905 (2014). https://doi.org/10.1002/adma.201306050
  13. S. W. Hwang, G. Park, H. Cheng, J. K. Song, S. K. Kang, L. Yin, J. H. Kim, F. G. Omenetto, Y. G. Huang, K. M. Lee, J. A. Rogers, "25th Anniversary Article: Materials for High-Performance Biodegradable Semiconductor Devices", Adv. Mater. 26 [13] 1992 (2014). https://doi.org/10.1002/adma.201304821
  14. S. H. Jin, S. K. Kang, I. T. Cho, S. Y. Han, H. U. Chung, D. J. Lee, J. Shin, G. W. Baek, T. I. Kim, J. H. Lee, J. A. Rogers, "Water-Soluble Thin Film Transistors and Circuits Based on Amorphous Indium-Gallium-Zinc Oxide", ACS Appl. Mater. Interfaces 7 [15] 8268 (2015). https://doi.org/10.1021/acsami.5b00086
  15. Y. Gao, Y. Zhang, X. Wang, K. Sim, J. S. Liu, J. Chen, X. Feng, H. X. Xu, C. J. Yu, "Moisture-triggered physically transient electronics", Science Advances 3 [9] (2017).
  16. C. J. Bettinger, Z. A. Bao, "Organic Thin-Film Transistors Fabricated on Resorbable Biomaterial Substrates", Adv. Mater. 22 [5] 651 (2010). https://doi.org/10.1002/adma.200902322
  17. T. Lei, M. Guan, J. Liu, H. C. Lin, R. Pfattner, L. Shaw, A. F. McGuire, T. C. Huang, L. L. Shao, K. T. Cheng, J. B. H. Tok, Z. N. Bao, "Biocompatible and totally disintegrable semiconducting polymer for ultrathin and ultralightweight transient electronics", Proc. Natl. Acad. Sci. U.S.A. 114 [20] 5107 (2017). https://doi.org/10.1073/pnas.1701478114
  18. S. W. Hwang, G. Park, C. Edwards, E. A. Corbin, S. K. Kang, H. Y. Cheng, J. K. Song, J. H. Kim, S. Yu, J. Ng, J. E. Lee, J. Kim, C. Yee, B. Bhaduri, Y. Su, F. G. Omennetto, Y. G. Huang, R. Bashir, L. Goddard, G. Popescu, K. M. Lee, J. A. Rogers, "Dissolution Chemistry and Biocompatibility of Single-Crystalline Silicon Nanomembranes and Associated Materials for Transient Electronics", ACS Nano 8 [6] 5843 (2014). https://doi.org/10.1021/nn500847g
  19. Y. F. Zheng, R. Z. Li, Y. D. Wang, "IN VITRO AND IN VIVO BIOCOMPATIBILITY STUDIES OF ZNO NANOPARTICLES", Int. J. Mod. Phys. B 23 [6-7] 1566 (2009). https://doi.org/10.1142/S0217979209061275
  20. I. Shimizu, D. MacFarlane, "Zinc Oxide Paste as Sunscreen in the Postoperative Period", Dermatologic Surgery 38 [6] 965 (2012). https://doi.org/10.1111/j.1524-4725.2012.02414.x
  21. L. Yin, H. Y. Cheng, S. M. Mao, R. Haasch, Y. H. Liu, X. Xie, S. W. Hwang, H. Jain, S. K. Kang, Y. W. Su, R. Li, Y. G. Huang, J. A. Rogers, "Dissolvable Metals for Transient Electronics", Adv. Funct. Mater. 24 [5] 645 (2014). https://doi.org/10.1002/adfm.201301847
  22. S. K. Kang, S. W. Hwang, H. Y. Cheng, S. Yu, B. H. Kim, J. H. Kim, Y. G. Huang, J. A. Rogers, "Dissolution Behaviors and Applications of Silicon Oxides and Nitrides in Transient Electronics", Adv. Funct. Mater. 24 [28] 4427 (2014). https://doi.org/10.1002/adfm.201304293
  23. G. Paradossi, F. Cavalieri, E. Chiessi, C. Spagnoli, M. K. Cowman, "Poly(vinyl alcohol) as versatile biomaterial for potential biomedical applications", J. Mater. Sci.-Mater. Med. 14 [8] 687 (2003). https://doi.org/10.1023/A:1024907615244
  24. R. Li, H. T. Cheng, Y. W. Su, S. W. Hwang, L. Yin, H. Tao, M. A. Brenckle, D. H. Kim, F. G. Omenetto, J. A. Rogers, Y. G. Huang, "An Analytical Model of Reactive Diffusion for Transient Electronics", Adv. Funct. Mater. 23 [24] 3106 (2013). https://doi.org/10.1002/adfm.201203088
  25. S. K. Kang, S. W. Hwang, S. Yu, J. H. Seo, E. A. Corbin, J. Shin, D. S. Wie, R. Bashir, Z. Q. Ma, J. A. Rogers, "Biodegradable Thin Metal Foils and Spin-On Glass Materials for Transient Electronics", Adv. Funct. Mater. 25 [12] 1789 (2015). https://doi.org/10.1002/adfm.201403469