Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Flexible Plasma Sheets

  • Cho, Guangsup (Department of Electrical and Biological Physics, Kwangwoon University) ;
  • Kim, Yunjung (Department of Electrical and Biological Physics, Kwangwoon University)
  • Received : 2017.11.25
  • Accepted : 2018.04.03
  • Published : 2018.03.31
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Abstract

With respect to the electrode structure and the discharge characteristics, the atmospheric pressure plasma sheet of a thin polyimide film is introduced in this study; here, the flexible plasma device of a dielectric-barrier discharge with the ground electrode and the high-voltage electrode formulated on each surface of a polyimide film whose thickness is approximately $100{\mu}m$, that is operated with a sinusoidal voltage at a frequency of 25 kHz and a low voltage from 1 kV to 2 kV is used. The streamer discharge is appeared along the cross-sectional boundary line between two electrodes at the ignition stage, and the plasma is diffused on the dielectric-layer surface over the high-voltage electrode. In the development of a plasma sheet with thin dielectric films, the avoidance of the insulation breakdown and the reduction of the leakage current have a direct influence on the low-voltage operation.

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