Fig. 1. Description of critical zone and the linear summation of contaminants
Fig. 2. Schematic design of the minienvironment system and positions of contamination source
Fig. 3. Velocity vectors in the y-z plane of x = 0.5 m in the minienvironment system with FOUP for the simulated cases from 1 to 6
Table 1. Six different cases to evaluate the risk rate
Table 2. The average concentrations of contaminant and the risk rates for external sources
Table 3. The average concentrations of contaminant and the risk rates for internal sources
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