한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제31권1호
  • /
  • Pages.29-33
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  • 2018
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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혼합 상의 바나듐 산화물 박막 제작 및 에탄올 가스 감지 특성 연구

Synthesis of Mixed Phase Vanadium Oxides Thin Films and Their Ethanol Gas Sensing Properties

  • 한수덕 (한국과학기술연구원 전자재료연구단) ;
  • 강종윤 (한국과학기술연구원 전자재료연구단)
  • Han, Soo Deok (Center for Electronic Materials, Korea Institute of Science and Technology (KIST)) ;
  • Kang, Chong-Yun (Center for Electronic Materials, Korea Institute of Science and Technology (KIST))
  • 투고 : 2017.10.10
  • 심사 : 2017.10.18
  • 발행 : 2018.01.01
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초록

Using a vanadium dioxide ($VO_2$) source, highly pure and amorphous vanadium oxide (VO) thin films were deposited using an e-beam evaporator at room temperature and high vacuum (<$10^{-7}$ Torr). Then, by controlling the post-annealing conditions such as $N_2:O_2$ pressure ratio and annealing time, we could easily synthesize a homogeneous $VO_2$ thin film and also mixed-phase VO thin films, including $VO_2$, $V_2O_5$, $V_3O_7$, $V_5O_9$, and $V_6O_{13}$. The crystallinity and phase of these were characterized by X-ray diffraction, and the surface morphology by FE-SEM. Moreover, the electrical properties and ethanol sensing measurements of the VO thin films were analyzed as a function of temperature. In general, mixed-phases as a self-doping effect have enhanced electrical properties, with a high carrier density and an enhanced response to ethanol. In summary, we developed an easy, scalable, and reproducible fabrication process for VO thin films that is a promising candidate for many potential electrical and optical applications.

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