Abstract
The electron energy probability function (EEPF) is of significant importance since the plasma chemistry such as the rate of ionization is determined by the electron energy distribution function. It is usually assumed to be Maxwell distribution for 0-D global model. Meanwhile, it has been observed experimentally that the form of EEPF of Ar plasma changes from being two-temperature to Druyvesteyn like as the gas pressure increases. Thus, to apply the 0-D global model of Maxwellian distribution to the non-Maxwellian plasma, we investigated the relative contribution of two distinct electrons with different temperatures. The contributions of cold/hot electrons to the equilibrium state of the plasma have attracted interest and been researched. The contributions to the power and particle balance of cold/hot electrons were studied by comparing the result of the global model considering all combinations of electron temperatures with that of 1-D Particle-in-Cell and Monte Carlo collision (PIC-MCC) simulation and the results of studies were analyzed physically. Furthermore, comparisons term by term for variations of the contribution of cold/hot electrons at different driving currents are presented.
