Design of the Supporting Structure of a Wire Saw for the Solar Cell Wafer

태양전지 웨이퍼용 Wire Saw안정화를 위한 지지구조 개선

  • Yi, Il Hwan (Graduate School, Kumoh National Institute of Technology) ;
  • Ro, Seung Hoon (Dept. of Mechanical System Engineering, Kumoh National Institute of Technology) ;
  • Kim, Dong Wook (Agency for Defense Development) ;
  • Park, In Kyu (Korea Institute of Robot and Convergence) ;
  • Kil, Sa Geun (Graduate School, Kumoh National Institute of Technology) ;
  • Kim, Young Jo (Dept. of Mechanical Engineering, Gumi University)
  • Received : 2018.08.24
  • Accepted : 2018.09.19
  • Published : 2018.09.30

Abstract

In recent years, the solar cell market has steadily grown with the demand for new energies. And wire sawing is one of the most critical processes in manufacturing solar cell wafer which is supposed to affect the breakage of wafers most during the process and afterwards. Generally, the defects of the wafers are generated from the structural vibrations of the machine. In the sawing process, the vibrations cause unnecessary normal stress on the cut surface of wafers, and eventually create the surface damage or leave the residual stress. In this study, the dynamic properties of a wire saw have been analyzed through the frequency response test and the computer simulation. And the effects of the design alterations have been investigated to stabilize the machine structure and further to reduce the vibrations. The result shows that relatively simple design alterations of supporting structure without any change of major parts of the machine can suppress the vibrations of the machine effectively.

Keywords

References

  1. Ro, S. H., Mechanical Vibrations with Applications, Chaos Book, pp. 22-58, 2013.
  2. Shin, H. B., and Ro, S. H., "Design Alterations of a Squaring & Grinding Machine for the Solar Cell Wafer to Suppress Vibrations", Journal of the Semiconductor & Display Technology, Vol. 16, pp25-30, 2017.
  3. Ro, S. H., Park, Y. R.," Stability Design of a Laser Cutter for the Strengthened Glass", Journal of the Semiconductor & Display Technology, Vol. 14, pp.19-25, 2015.
  4. Ro, S. H., "Design Alteration of a Milling Machine Structure for the Improved Stability," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 5, pp. 72-78, 2006.
  5. Cho, H. J., and Ro, S. H., "Effect of Design Parameters on the Variation of Natural Frequencies of the Uniform and the Nonuniform Cantilever Beams," Transactions of the KSME, Vol. 23, pp. 697-708, 1999.
  6. Yi, I. H., and Ro, S. H., "Structural Design of an Ingot Grower of the Semiconductor Wafer for the Stability Improvement", Journal of the Semiconductor & Display Technology, Vol. 16, No. 1, pp. 14-39, 2017.
  7. Jeon, C. S., Kim, Y. G., and Kwon, H. B., "A Study on Impact Damage Characteristics of the Window Glass for High Speed Train," Journal of the Korean Society for Railway, Vol. 15, pp. 217-223, 2012. https://doi.org/10.7782/JKSR.2012.15.3.217