반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

DC 스퍼터링을 이용한 소다라임 유리 기판상에 2차원 황화텅스텐 박막 형성 공정

DC Sputtering Process of 2-Dimensional Tungsten Disulfide Thin Films on Soda-Lime Glass Substrates

  • 마상민 (가천대학교 전자공학과) ;
  • 권상직 (가천대학교 전자공학과) ;
  • 조의식 (가천대학교 전자공학과)
  • Ma, Sang Min (Department of Electronics Engineering, Gachon University) ;
  • Kwon, Sang Jik (Department of Electronics Engineering, Gachon University) ;
  • Cho, Eou Sik (Department of Electronics Engineering, Gachon University)
  • 투고 : 2018.08.14
  • 심사 : 2018.09.19
  • 발행 : 2018.09.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Tungsten disulfide($WS_2$) thin films were directly deposited by direct-current(DC) sputtering and annealed by rapid thermal processing(RTP) to materialize two-dimensional p-type transition metal dichalcogenide (TMDC) thin films on soda-lime glass substrates without any complicated exfoliation/transfer process. $WS_2$ thin films deposited at various DC sputtering powers from 80 W to 160W were annealed at different temperatures from $400^{\circ}C$ to $550^{\circ}C$ considering the melting temperature of soda-lime glass. The optical microscope results showed the stable surface morphologies of the $WS_2$ thin films without any defects. The X-ray photoelectron spectroscopy (XPS) results and the Hall measurement results showed stable binding energies of W and S and high carrier mobilities of $WS_2$ thin films.

키워드

참고문헌

  1. Akinwande, D., Petrone, N., and Hore, J., "Two-dimensional flexible nanoelectronics," Nature. Comnications. Vol. 5, p.5678, 2014.
  2. El-Hami, K., Louro, C., and Cavaleiro, A., "Sized $WS_2$ Lamellae and their Texture Orientations Growth," Material Science Research India, Vol. 11, pp.98-101, 2014. https://doi.org/10.13005/msri/110202
  3. Delabie, A., Caymax, M., Groven, B., Heyne, M., Haesevoets, K., Meersschaut, J., Nytten, T., Bender, H., and Conard, T., "Low temperature deposition of 2D $WS_2$ layers from $WF_6$ and $H_2S$ precursors: impact of reducing agents," Chemical Communications, Vol. 51, pp.15692-15695, 2015. https://doi.org/10.1039/C5CC05272F
  4. Yang, Z., Gao, D., Zhang, J., Xu, Q., Shi, S., Tao, K., and Xue, D., "Realization of high Curie temperature ferroma gnetism in atomically thin $MoS_2$ and $WS_2$ nanosheets with uniform and flower-like morphology," Nanoscale Vol. 5, pp.650-658, 2015.
  5. McCreary, K. M., Hanbicki, A. T., Jernigan, G. G., Culbertson, J. C., and Jonker, B. T., "Syntheis of Large-Area $WS_2$ monolayres with Exceptional Photoluminescence," Scientific Reports. Vol. 6, p.19159, 2016. https://doi.org/10.1038/srep19159
  6. Chiu, M. H., Zhang, C., Shiu, H. W., Chuu, C. P., and Chen, C. H., "Determination of band alignment in the single-layer $MoS_2/WSe_2$ heterojunction," Nature. Comnications. Vol. 6, p.7666, 2015.
  7. Park, J., and Kang, Y.-C., "Effect of Radio Frequency Power on the Physicochemical Properties of $MoS_2$ Films Obtained by rf Magnetron Sputtering," Bulletin of the Korean Chemical Society, Vol. 37, pp.1326-1330, 2016. https://doi.org/10.1002/bkcs.10864
  8. Kim, S-Y., Kwon, S-J., "High Conductive Transparent Electrode of ITO/Ag/i-ZnO by In-Line Magnetron Sputtering Method," journal of the Semiconductor & Display Technology, Vol. 14, pp. 33-36, 2015.