진공이야기 (Vacuum Magazine)

한국진공학회 (The Korean Vacuum Society)
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더스티 플라즈마 연구 동향

Dusty Plasmas-from space to semiconductor & display industries

  • 채길병 (한국원자력연구원 원자력데이터센터)
  • 발행 : 2017.06.30
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초록

Dusty plasmas consisting of electrons, ions, neutral gas molecules, and small solid-state 'dust' particles are ubiquitous. Examples include plasma processing, fusion plasmas, polar mesospheric clouds, Saturn's rings, comet tails, and protoplanetary disks. Since Voyager I and II discovered dusty plasmas in our solar system, dusty plasmas have been extensively studied from space & basic sciences to semiconductor & display industries. Here, a brief review on dusty plasma research is given and some remarkable results are introduced.

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참고문헌

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