한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제16권5호
  • /
  • Pages.40-46
  • /
  • 2017
  • /
  • 1598-6721(pISSN)
  • /
  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
권호 표지
DOI QR코드

DOI QR Code

CVD-SiC 소재의 가공 특성에 관한 연구

A Study on the Machining Characteristics of CVD-SiC

  • 박휘근 (금오공과대학교 기계설계공학과) ;
  • 이원석 (금오공과대학교 기계설계공학과) ;
  • 강동원 (금오공과대학교 기계설계공학과) ;
  • 박인승 (금오공과대학교 기계설계공학과) ;
  • 이종찬 (금오공과대학교 기계설계공학과)
  • 투고 : 2017.08.16
  • 심사 : 2017.08.31
  • 발행 : 2017.10.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A plasma gas control apparatus for semiconductor plasma etching processes securely holds a cathode for forming a plasma, confines the plasma during the plasma etching process, and discharges gas after etching. It is a key part of the etching process. With the advancement of semiconductor technology, there is increasing interest in parts for semiconductor manufacturing that directly affect wafers. Accordingly, in order to replace the plasma gas control device with a CVD-SiC material superior in mechanical properties to existing SiCs (Sintered-SiC, RB-SiC), a study on the grinding characteristics of CVD-SiC was carried out. It is confirmed that the optimal grinding condition was obtained when the result table feed rate was 2 m/min and the infeed depth was $5{\mu}m$.

키워드

과제정보

연구 과제 주관 기관 : 금오공과대학교

참고문헌

  1. Lee, S. M., "A Study on the Grinding Characteristics of Surgical Implant Zirconia," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 13, No. 1, PP. 72-77, 2004. https://doi.org/10.14775/ksmpe.2014.13.1.072
  2. Lee, C. S., "A Study on the Grinding Characteristics of SiC," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 13, No. 1, pp. 245-250, 2006.
  3. Rhee, H. W., "Experimental Evaluation of Fatigue Threshold for SA-508 Reactor Vessel Steel," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 11, No. 4, pp. 160-167, 2012.
  4. Park, J. K., Kim, I. W. and Choi, M. P., "Optimal Synthesis of Steering Mechanisms Considering Transmission Angles," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 11, No. 1, pp. 68-75, 2012.
  5. Choi, H., "A Study on the Precision of a Machined Surface in Thrust Internal Grinding," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 15, No. 5, pp. 73-79, 2016. https://doi.org/10.14775/ksmpe.2016.15.5.073
  6. Choi, H., "A Study on the Comparison of Internal Plunge Grinding and Internal Thrust Grinding," Journal of the Korean Society of Manufacturing Process Engineers, Vol. 15, No. 1, pp. 68-73, 2016. https://doi.org/10.14775/ksmpe.2016.15.1.068
  7. Malkin, S., "Grinding Technology(Theory and Applicarions of Machining with Abrasives)" pp. 110-111
  8. Lee, J. C., Machine tools for the 21st century, Munundang, pp. 15-329, 2004.

피인용 문헌

  1. Analysis of Grinding Characteristics of Ceramic (SiC) Materials vol.17, pp.1, 2018, https://doi.org/10.14775/ksmpe.2018.17.1.016
  2. 피드스루용 세라믹의 선삭 가공 특성에 관한 연구 vol.19, pp.10, 2017, https://doi.org/10.14775/ksmpe.2020.19.10.081