한국표면공학회지 (Journal of Surface Science and Engineering)

  • 제50권5호
  • /
  • Pages.392-397
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  • 2017
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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고속 마이크로 외팔보 공진시험을 통한 나노스케일 티타늄 박막의 탄성계수 평가

High-speed Microcantilever Resonance Testing on the Young's Modulus of a Nanoscale Titanium Film

  • 김윤영 (동의대학교 기계자동차로봇부품공학부)
  • Kim, Yun Young (Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui University)
  • 투고 : 2017.08.31
  • 심사 : 2017.10.11
  • 발행 : 2017.10.31
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초록

The Young's modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young's modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.

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참고문헌

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