Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
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Effects of the Capacitive Field in an Inductively Coupled Plasma Discharge

  • Choe, HeeHwan (School of Electronics and Information Engineering, Korea Aerospace University)
  • Received : 2017.07.12
  • Accepted : 2017.08.31
  • Published : 2017.09.30
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Abstract

Plasma characteristics of two-dimensional inductively coupled discharge simulation is investigated. Impedance of an inductively coupled plasma discharge was considered. Voltage drops across antenna coils and current variation between coils made different profiles of plasma characteristics. Importance of the capacitive field effect in some case was analyzed.

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References

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