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Cost Benefit Analysis of SF6 Decomposition Process Using an Electron Beam

전자빔을 이용한 SF6 처리 공정의 경제성 분석

  • Park, Jun-Hyeong (Research Division for Industry & Environment, Korea Atomic Energy Research Institute) ;
  • Seo, Seo Hee (Research Division for Industry & Environment, Korea Atomic Energy Research Institute) ;
  • Son, Youn-Suk (Research Division for Industry & Environment, Korea Atomic Energy Research Institute)
  • 박준형 (한국원자력연구원 공업환경연구부) ;
  • 서서희 (한국원자력연구원 공업환경연구부) ;
  • 손윤석 (한국원자력연구원 공업환경연구부)
  • Received : 2017.07.05
  • Accepted : 2017.08.08
  • Published : 2017.08.31

Abstract

This study was performed to investigate whether the decomposition process of $SF_6$ using an electron beam is economically reasonable when applied to the actual field. To do this, electron beam experiment and economic analysis were conducted. The experiment conditions are initial concentration of 1% of $SF_6$, 1 mA of input energy and 15 mA of flow rate with $H_2$ as an additive which were obtained from our previous research. As a result, removal efficiency of $SF_6$ was 90% for 8 hours continuously. In addition, economic analysis shows positive results in terms of using $SF_6$ decomposition process using electron beam. According to the analysis, the revenue is approximately 1.66 billion won in the first year and 3 billion won in the second year.

Keywords

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  1. A Study on Decomposition of Perfluorocompounds (NF3, CF4, SF6) Emitted from Semiconductor Process using Plasma vol.35, pp.3, 2018, https://doi.org/10.9786/kswm.2018.35.3.250