Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Piezoelectric Energy Harvesting Characteristics of Hard PZT Interdigitated Electrode (IDE) Unimorph Cantilever

Hard PZT IDE 유니몰프 캔틸레버의 압전 에너지 하베스팅 특성

  • Lee, Min-seon (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Chang-il (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Yun, Ji-sun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Woon-ik (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Hong, Youn-woo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Cho, Jeong-ho (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Paik, Jong-hoo (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Park, Yong-ho (Department of Material Science and Engineering, Pusan University) ;
  • Jang, Yong-ho (Technology & Research Center, Senbool Corporation) ;
  • Choi, Beom-jin (Technology & Research Center, Senbool Corporation) ;
  • Jeong, Young-hun (Electronic Materials & Component Center, Korea Institute of Ceramic Engineering and Technology)
  • 이민선 (한국세라믹기술원 전자소재부품센터) ;
  • 김창일 (한국세라믹기술원 전자소재부품센터) ;
  • 윤지선 (한국세라믹기술원 전자소재부품센터) ;
  • 박운익 (한국세라믹기술원 전자소재부품센터) ;
  • 홍연우 (한국세라믹기술원 전자소재부품센터) ;
  • 조정호 (한국세라믹기술원 전자소재부품센터) ;
  • 백종후 (한국세라믹기술원 전자소재부품센터) ;
  • 박용호 (부산대학교 재료공학과) ;
  • 장용호 ((주)센불 기술연구소) ;
  • 최범진 ((주)센불 기술연구소) ;
  • 정영훈 (한국세라믹기술원 전자소재부품센터)
  • Received : 2017.05.19
  • Accepted : 2017.06.29
  • Published : 2017.08.01
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Abstract

A unimorph piezoelectric cantilever generator with an interdigitated electrode (IDE) was developed for vibration energy harvester applications driven in the longitudinal mode. Hard lead zirconate titanate (PZT) ceramic with a high $Q_m$ of 1,280 was used as the piezoelectric active material. Ten PZT sheets produced by tape casting were laminated and co-fired with an Ag/Pd IDE at $1,050^{\circ}C$ for 2 h. The approximately $280{\mu}m$-thick co-fired PZT laminate with the IDE was attached to a stainless steel substrate with an adhesive epoxy for the fabrication of an IDE unimorph cantilever. Its energy harvesting characteristics were evaluated: an output power of $1.1{\mu}W$ at 120 Hz across the resistive load of $700k{\Omega}$ was obtained, corresponding to a normalized power factor of $4.1{\mu}W/(G^2{\cdot}cm^3)$.

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References

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