한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제30권7호
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  • Pages.447-453
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  • 2017
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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RF 스퍼터법을 이용한 Li2MnSiO4 리튬 이차전지 양극활물질 박막 제조 및 전기화학적 특성

Fabrication of Li2MnSiO4 Cathode Thin Films by RF Sputtering for Thin Film Li-ion Secondary Batteries and Their Electrochemical Properties

  • 채수만 (군산대학교 신소재공학과) ;
  • 심중표 (군산대학교 나노화학공학과) ;
  • 선호정 (군산대학교 신소재공학과)
  • Chae, Suman (Department of Materials Science and Engineering, Kunsan National University) ;
  • Shim, Joongpyo (Department of Nano and Chemical Engineering, Kunsan National University) ;
  • Sun, Ho-Jung (Department of Materials Science and Engineering, Kunsan National University)
  • 투고 : 2017.02.11
  • 심사 : 2017.04.16
  • 발행 : 2017.07.01
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초록

In this study, $Li_2MnSiO_4$ cathode material and LiPON solid electrolyte were manufactured into thin films, and the possibility of their use in thin-film batteries was researched. When the RTP treatment was performed after $Li_2MnSiO_4$ cathode thin-film deposition on the SUS substrate by a sputtering method, a ${\beta}-Li_2MnSiO_4$ cathode thin film was successfully manufactured. The LiPON solid electrolyte was prepared by a reactive sputtering method using a $Li_3PO_4$ target and $N_2$ gas, and a homogeneous and flat thin film was deposited on a $Li_2MnSiO_4$ cathode thin film. In order to evaluate the electrochemical properties of the $Li_2MnSiO_4$ cathode thin films, coin cells using only a liquid electrolyte were prepared and the charge/discharge test was conducted. As a result, the amorphous thin film of RTP treated at $600^{\circ}C$ showed the highest initial discharge capacity of about $60{\mu}Ah/cm^2$. In cases of coin cells using liquid/solid double electrolyte, the discharge capacities of the $Li_2MnSiO_4$ cathode thin films were comparable to those without solid LiPON electrolyte. It was revealed that $Li_2MnSiO_4$ cathode thin films with LiPON solid electrolyte were applicable in thin film batteries.

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