Development of in-situ Passivation System for High Efficiency and Long Lifetime of Flexible OLED Display

고효율 장수명의 Flexible OLED 디스플레이를 위한 in-situ Passivation System 개발

  • Kim, Kwan-Do (Dept. of Computer Science, Pyeongtaek University)
  • Received : 2017.03.14
  • Accepted : 2017.03.30
  • Published : 2017.03.31


This study focused on the development of in-situ passivation system and characterization of OLED display. The thin film passivation process with thin film layers was investigated using in-situ passivation technique in the cluster system. Thin films of $SiO_2$, SiNx passivation were manufactured using PECVD, which enables the deposition process at room temperature. The cluster system was created to develop in-situ passivation process, which OLED and thin film were fabricated in the cluster system without exposing to the atmospheric environment. It is expected that the in-situ passivation system of OLED with organic and inorganic layer provides the leading technique to develop flexible OLED.


  1. C. W. Tang and S. A. VanSlyke, "Organic electroluminescent Diodes," Appl. Phys. Lett., vol. 51, no 12, pp. 913-915, 1987.DOI:10.1063/1.98799
  2. Yiru Sun and Stephen R. Forrest, "High-efficiency white organic light emitting devices with three separate phosphorescent emission layers," Appl. Phys. Lett., vol. 91, 263503, 2007.DOI:10.1063/1.2827178
  3. Kiran T. Kamtekar, Andrew P. Monkman, and Martin R. Bryce, "Recent advances in white organic light-emitting materials and devices (WOLEDs)," Adv. Mater., vol. 22, pp. 572-582, 2010.DOI: 10.1002/adma.200902148
  4. J. H. Seo, B. M. Seoo, J. R. Kim, K. H. Lee, J. N. You, S. S. Yoon, Y. K. Kim, "Blue organic light-emitting diodes with efficient host-dopant energy level alignment," Current Applied Physics, vol 11, pp. 356-358, 2011. DOI:10.1016/j.cap.2011.03.059
  5. Duan Yu, Yong-Qiang Yang, Zheng Chen, Ye Tao, Yun-Fei Liu, "Recent progress on thin-film encapsulation technologies for organic electronic devices," Optics Communications, vol 362. pp. 43-49, 2016.DOI:10.1016/j.optcom.2015.08.021