Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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화학기상증착법(CVD)을 이용한 탄화규소(SiC) 에피택셜 성장

  • 김현우 (서울대학교 재료공학부) ;
  • 김형준 (서울대학교 재료공학부)
  • Published : 2017.06.01
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Abstract

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References

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