Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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RF-MEMS-Based DPDT Switch on Silicon Substrate for Ku-Band Space-Borne Applications

  • Singh, Harsimran (Department of Electronics & Communication Engineering, Guru Nanak Dev University-Regional Campus) ;
  • Malhotra, Jyoteesh (Department of Electronics & Communication Engineering, Guru Nanak Dev University-Regional Campus)
  • Received : 2016.06.30
  • Accepted : 2016.11.03
  • Published : 2017.02.25
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Abstract

A RF-MEMS (radio-frequency microelectromechanical-system) based DPDT (double pole double throw) switch for the Ku band has been designed and analyzed for this article. The switch topology is based on the FG-CPW (finite ground-coplanar waveguide) configuration of a microstrip-transmission line. An FEM-based multiphysics solver is used for the evaluation of the spring constant, stress distribution, and pull-in voltage regarding the requirements of the switch-beam unit. The electromagnetic performance of the switch is investigated for a $675{\mu}m$ thick silicon substrate. For the operational frequency of 14.5 GHz, an insertion loss better than -0.3 dB, a return loss better than -40 dB, and input/output- and output-port isolations better than -35 dB are achieved for the switching unit.

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