RF 플라즈마 전력 전송 기술

참고문헌

1. L. E. Frenzel, RF Power for Industrial Applications, Prentice Hall, (2003).
2. R. Ludwig and P. Bretchko, RF Circuit Design: Theory and Applications, Pearson, (2000).
3. D. L. Goodman and N. M. P. Benjamin, J. Phys. D:Appl. Phys., 36, 2845 (2003). https://doi.org/10.1088/0022-3727/36/22/012
4. V. Brouk and R. Heckman, Stabilizing RF generator and Plasma Interactions, Proc. 47th Society of Vacuum Coaters(Dallas), 2004.
5. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd edition, A John Wiley & Sons, 2005