초록
In this paper, $Pb(Mn_{1/3}Nb_{2/3})_{0.07}(Ni_{1/3}Nb_{2/3})_{0.10}(Zr_{0.5}Ti_{0.5})_{0.83}O_3$ ceramics were fabricated by the conventional solid state method to obtain excellent dielectric properties for ultrasonic generators. The effects of 2nd calcination temperature on their microstructure and piezoelectric properties were systematically investigated. The tetragonality increased in the ceramics when 2nd calcination temperature increased to the optimized temperature at $750^{\circ}C$. At that temperature, excellent physical properties ($d_{33}=352\;pC/N$, ${\varepsilon}_r=1,687$, $k_p=0.570$, $Q_m=1,640$) were obtained for ultrasonic generator application.