한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제50권1호
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  • Pages.35-41
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  • 2017
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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원자층 증착법에 의한 TiO2, Al2O3, 및 TiO2-Al2O3 나노라미네이트 박막이 316L Stainless Steel의 부식특성에 미치는 영향

Corrosion Properties of Atomic Layer Deposited TiO2, Al2O3 and TiO2-Al2O3 Nanolaminated Film Coated 316L Stainless Steel

  • 이우재 (부산대학교, 재료공학부) ;
  • 만지흠 (부산대학교, 재료공학부) ;
  • 김다영 (부산대학교, 재료공학부) ;
  • 장경수 ((주)서영, 나노융합사업팀) ;
  • 최현진 (부산테크노파크, 멤스나노부품생산센터) ;
  • 최우창 (부산테크노파크, 멤스나노부품생산센터) ;
  • 권세훈 (부산대학교, 재료공학부)
  • Lee, Woo-Jae (School of Materials Science and Engineering, Pusan National University) ;
  • Wan, Zhixin (School of Materials Science and Engineering, Pusan National University) ;
  • Kim, Da Young (School of Materials Science and Engineering, Pusan National University) ;
  • Jang, Kyung Su (Nano Convergence Team, Seo Yeong Co. Ltd.) ;
  • Choi, Hyun-Jin (MEMS/NANO Component Production Center, Busan Techno Park) ;
  • Choi, Woo-Chang (MEMS/NANO Component Production Center, Busan Techno Park) ;
  • Kwon, Se Hun (School of Materials Science and Engineering, Pusan National University)
  • 투고 : 2017.01.31
  • 심사 : 2017.02.21
  • 발행 : 2017.02.28
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초록

$TiO_2$, $Al_2O_3$, and $TiO_2-Al_2O_3$ nanolaminated films were grown by atomic layer deposition (ALD) on the 316L stainless steel (SS316L) substrates at a temperature of $150^{\circ}C$. The growth kinetics of $ALD-TiO_2$ and $Al_2O_3$ thin films were systematically investigated in order to precisely control the thickness of each layers in the $TiO_2-Al_2O_3$ nanolaminated films using a high-resolution transmission electron microscopy. And, the exact deposition rates of $ALD-TiO_2$ on $Al_2O_3$ surface and $ALD-Al_2O_3$ on $TiO_2$ surface were revealed to be 0.0284 nm/cycle and 0.11 nm/cycle, respectively. At given growth conditions, the microstructures of $TiO_2$, $Al_2O_3$ and $TiO_2-Al_2O_3$ nanolaminated films were amorphous. The potentiodynamic polarization test revealed that the $TiO_2-Al_2O_3$ nanolaminated film coated SS316L had a best corrosion resistance, although all ALDcoated SS316L exhibited a clear improvement of the corrosion resistance compared with a bare SS316L.

키워드

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