Abstract
In the study, the inner flow characteristics were analyzed by modifying the inner design parameter of the vane-type vacuum pump. The effect of pressure generated by the inner flow of pump on the rotor and vane was analyzed. The design parameter was analyzed using the angle variation of tilting and rotation of the vane. MRF was used for the analysis conducted using a virtual condition where the rotor and vane are rotated. The pressure gained from the load of the rotor and vane in the flow analysis is used for the structure analysis. Based on the results, the effect of variable vane design was revealed in structural strength. The effect of centrifugal and friction force generated during pump operation on structural strength was also analyzed.