Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

고온 동작용 다이아몬드 전력 반도체 기술

  • 하민우 (명지대학교 전기공학과)
  • Published : 2017.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords

References

  1. B. J. Baliga, Power Semiconductor Devices (PWS Publishing Company, Boston, 1996), p. 3.
  2. U. K. Mishra, L. Shen, T. E. Kazior, and Y. F. Wu, Proc. IEEE, 96, 287 (2008). https://doi.org/10.1109/JPROC.2007.911060
  3. N. Ikeda, Y. Miiyama, H. Kambayashi, Y. Sato, T. Nomura, S. Kato, and S. Yoshida, Proc. IEEE, 98, 1151 (2008).
  4. J. A. Cooper and A. Agarwal, Proc. IEEE, 90, 956 (2002). https://doi.org/10.1109/JPROC.2002.1021561
  5. A. Aleksov, M. Kubovic, N. Kaeb, U. Spitzberg, A. Berfmaier, G. Dollinger, Th. Bauer, M. Schreck, B. Stritzker, and E. Kohn, Diamond Relat. Mat., 12, 391 (2003). https://doi.org/10.1016/S0925-9635(02)00401-6
  6. A. Aleksov, M. Kubovic, M. Kasu, P. Schmid, D. Grobe, S. Ertl, M. Schreck, B. Stritzker, and E. Kohn, Diamond Relat. Mat., 13, 233 (2004). https://doi.org/10.1016/j.diamond.2003.11.090
  7. A. Denisenko and E. Kohn, Diamond Relat. Mat., 14, 491 (2005). https://doi.org/10.1016/j.diamond.2004.12.043
  8. G. Chicot, D. Eon, and N. Rouger, Diamond Relat. Mat., 69, 68 (2016). https://doi.org/10.1016/j.diamond.2016.07.006
  9. P. L. Dreike, D. M. Fleetwood, D. B. King, D. C. Sprauer, and T. E. Zipperian, IEEE Trans. Compon. Packag. Manuf. Technol., 17, 594 (1994). https://doi.org/10.1109/95.335047
  10. C. J. H. Wort and R. S. Balmer, Mater. Today, 17, 22 (2008).
  11. J. Isberg, J. Hammersberg, E. Johansson, T. Wikstrom, D. J. Twitchen, A. J. Whitehead, S. E. Coe, and G. A. Scarsbrook, Science, 297, 1670 (2002). https://doi.org/10.1126/science.1074374
  12. B. J. Baliga, J. Appl. Phys., 53, 1759 (1982). https://doi.org/10.1063/1.331646
  13. H. Umezawa, M. Nagase, Y. Kato, and S. I. Shikata, Diamond Relat. Mat., 24, 201 (2012). https://doi.org/10.1016/j.diamond.2012.01.011
  14. A. Traore, Thesis of High power diamond Schottky diode, University of Grenoble, France (2014).
  15. R. J. Hemley, Single-Crystal Diamonds: new developments and applications, https://legacy.gl.ciw.edu/static/users/rhemley/Hemley_AIRAPT_2011.pdf
  16. Element six, The element six CVD diamond handbook, p. 5, https://e6cvd.com/media/wysiwyg/pdf/E6_CVD_Diamond_Handbook_A5_v10X.pdf
  17. D. G. Goodwin and J. E. Butler, Handbook of industrial diamonds and diamond films (Marcel Dekker, Inc., New York, 1997) p. 527.
  18. T. R. Anthony, Handbook of industrial diamonds and diamond films, Vacuum, 41, 1356 (1990). https://doi.org/10.1016/0042-207X(90)93956-J
  19. T. Teraji, Physics and applications of CVD diamond (Wiley-VCH, Weinheim, 2008) p. 29.
  20. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth, 62, 642 (1983). https://doi.org/10.1016/0022-0248(83)90411-6
  21. H. Umezawa, N. Tokuda, M. Ogura, S. G. Ri, and S. I. Shikata, Diamond Relat. Mat., 15, 1949 (2006). https://doi.org/10.1016/j.diamond.2006.08.030
  22. K. Ikeda, H. Umezawa, S. Shikata, Diamond Relat. Mat., 17, 809 (2008). https://doi.org/10.1016/j.diamond.2007.12.066
  23. K. Ikeda, H. Umezawa, N. Tatsumi, K. Ramanujam, and S. I. Shikata, Diamond Relat. Mat., 18, 292 (2009). https://doi.org/10.1016/j.diamond.2008.10.021
  24. R. Kumaresan, H. Umezawa, N. Tatsumi, K. Ikeda, and S. I. Shikata, Diamond Relat. Mat., 18, 299 (2009). https://doi.org/10.1016/j.diamond.2008.10.055
  25. H. Umezawa, Y. Mokuno, H. Yamada, A. Chayahara, and S. I. Shikata, Diamond Relat. Mat., 19, 208 (2010). https://doi.org/10.1016/j.diamond.2009.11.001
  26. P. Muret, P. N. Volpe, T. N. Tran-Thi, J. Pernot, C. Hoarau, F. Omnes, and T. Teraji, Diamond Relat. Mat., 20, 285 (2011). https://doi.org/10.1016/j.diamond.2011.01.008
  27. A. Nawawi, K. J. Tseng, Rusli, G. A. J. Amaratunga, H. Umezawa, and S. Shikata, Diamond Relat. Mat., 35, 1 (2013). https://doi.org/10.1016/j.diamond.2013.03.002
  28. H. Umezawa, N. Tatsumi, Y. Kato, and S. I. Shikata, Diamond Relat. Mat., 40, 56 (2013). https://doi.org/10.1016/j.diamond.2013.09.011
  29. H. Umezawa, N. Tatsumi, Y. Kato, and S. I. Shikata, Diamond Relat. Mat., 36, 51 (2013). https://doi.org/10.1016/j.diamond.2013.04.009
  30. Y. Kato, H. Umezawa, and S. I. Shikata, Diamond Relat. Mat., 57, 22 (2015). https://doi.org/10.1016/j.diamond.2015.03.021
  31. H. Umezawa, S. I. Shikata, and T. Funaki, Jpn. J. Appl. Phys., 53, 05FP06 (2014). https://doi.org/10.7567/JJAP.53.05FP06
  32. H. Umezawa and S. I. Shikata, Jpn. J . Appl. Phys., 53, 04EP04 (2014). https://doi.org/10.7567/JJAP.53.04EP04
  33. D. W. Kang, H. N. Chang, and M. W. Ha, Jpn. J. Appl. Phys., 56, 06GE09 (2017). https://doi.org/10.7567/JJAP.56.06GE09
  34. H. N. Chang, D. W. Kang, and M. W. Ha, Trans. Korean Instist. Electr. Eng., 66, 659 (2017). https://doi.org/10.5370/KIEE.2017.66.4.659