Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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3-Dimensional Shape Measurement System for BGA Balls Using PMP Method

PMP 방식을 이용한 BGA 볼의 3차원 형상측정 시스템

  • Kim, Hyo Jun (Dept. of Electronics Engineering, Hoseo University) ;
  • Kim, Joon Seek (Dept. of Electronics Engineering, Hoseo University) ;
  • Joo, Hyonam (Dept. of Digital Display Engineering, Hoseo University)
  • 김효준 (호서대학교 전자공학과) ;
  • 김준식 (호서대학교 전자공학과) ;
  • 주효남 (호서대학교 디지털디스플레이공학과)
  • Received : 2015.08.10
  • Accepted : 2015.12.16
  • Published : 2016.01.01
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Abstract

As modern electronic devices get smaller and smaller, high-resolution, large Field-Of-View (FOV), fast, and cost-effective 3-dimensional (3-D) measurement is requested more and more. In particular, defect inspection machines using machine-vision technology nowadays require 3-D inspection as well as the conventional 2-D inspection. Phase Measuring Profilometry (PMP) is one of the fast non-contact 3-D shape measuring methods currently being extensively investigated in the electronic component manufacturing industry. The PMP system is well known and is successfully applied to measuring complex surface profiles with varying reflectance properties. However, for highly reflective surfaces, such as Ball Grid Arrays (BGAs), it has difficulty accurately measuring 3-D shapes. In this paper, we propose a new fast optical system that can eliminate the highly reflective saturated regions in BGA ball images. This is achieved by utilizing four Low Intensity Grating (LIG) images together with the conventional High Intensity Grating (HIG) images. Extensive experiments using BGA samples show a repeatability of under ${\pm}20um$ in standard deviation, which is suitable for most 3-D shape measurements of BGAs.

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References

  1. W. Y. Choi and R.-H. Park, "Stereo vision and application," Journal of the Institute of Electronics Engineers of Korea, vol. 10, 12B, pp. 36-38, 1994.
  2. T.-H. Cho and D.-S. Jang, "High speed 3D measurement of BGA (Ball Grif Array)," Proc. of The Korean Institute of Information Scientists and Engineer 28th Fall Conference, vol. 28, no. 2, pp. 481-483, 2001.
  3. W.-J. Ryu, Y.-J. Kang, H.-M. Rho, and D.-H. Lee, "A study on 3-D shape measurement and application by using digital projection moire(II)," Journal of the Korean Society for Precision Engineering, vol. 24, no. 5, pp. 62-67, 2007.
  4. Q. Zhang, X. Su, Y. Cao, Y. Li, L. Xiang, and W. Chen, "Optical 3-D shape and deformation measurement of rotating blades using stroboscopic structured illumination," Optical Engineering, vol. 44, no. 11, pp. 113601-113601, 2005. https://doi.org/10.1117/1.2127927
  5. Zhang, Qican, and S. Xianyu, "High-speed optical measurement for the drumhead vibration," Optics express, vol. 13, no. 8, pp. 3110-3116, 2005. https://doi.org/10.1364/OPEX.13.003110
  6. X. Su, Q. Zhang, Y. Li, L. Xiang, Y. Cao, and W. Chen, "A stroboscopic structured illumination system used in dynamic 3D visualization of high-speed motion object," Proc. of Microtechnologies for the New Millennium 2005, International Society for Optics and Photonics, vol. 5852, pp. 796-799, 2005.
  7. Hu, Eryi and Yuming He, "Surface profile measurement of moving objects by using an improved $\pi$ phase-shifting Fourier transform profilometry," Optics and Lasers in Engineering, vol. 47, no. 1, pp. 57-61, 2009. https://doi.org/10.1016/j.optlaseng.2008.08.003
  8. Y.-C. Park, et al., "A high-speed digital laser grating projection system for the measurement of 3-dimensional shapes," Journal of the Optical Society of Korea, vol. 13, no. 2, pp. 251-255, 2009. https://doi.org/10.3807/JOSK.2009.13.2.251
  9. H. Xie, A. Asundi, C. G. Boay, L. Yunguang, J. Yu, Z. Zhaowei, and B. K. A. Ngoi, "High resolution AFM scanning Moire method and its application to the micro-deformation in the BGA electronic package," Microelectronics Reliability, vol. 42, no. 8, pp. 1219-1227, 2002. https://doi.org/10.1016/S0026-2714(02)00084-7
  10. Y. Surrel, "Phase stepping: a new self-calibrating algorithm," Applied Optics, vol. 32, no. 19, pp. 3598-3600, 1993. https://doi.org/10.1364/AO.32.003598