DOI QR코드

DOI QR Code

A study on fabrication of HNS remote sensor module with printed ITO films

ITO 인쇄박막을 이용한 원격 감시형 위험유해물질 검출 센서 모듈 제작에 관한 연구

  • Lee, Seok-Hwan (Department of Convergence Study on the Ocean Science and Technology, Korea Maritime and Ocean University) ;
  • Cho, Sung-Min (Department of Convergence Study on the Ocean Science and Technology, Korea Maritime and Ocean University) ;
  • Kim, Chang-Min (Major of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Kim, Hyeong-Ho (Major of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Yang, Han-Uk (Major of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Oh, Ji-Eun (Major of Electronic Material Engineering, Korea Maritime and Ocean University) ;
  • Chang, Ji-Ho (Major of Electronic Material Engineering & Department of Convergence Study on the Ocean Science and Technology, Korea Maritime and Ocean University)
  • Received : 2016.02.22
  • Accepted : 2016.04.22
  • Published : 2016.05.31

Abstract

In this study, we investigated the feasibility of using printed Indium Tin Oxide (ITO) film as a remote sensor for Hazardous and Noxious Substances (HNS). To improve the quality of the ITO films, binder mixing ratio, Sn concentration in ITO, thermal treatment temperature, and printing process conditions were optimized. We fabricated an electrical resistance-type liquid sensor, and to confirm the sensor operation, the change in resistance in air and seawater was monitored. The change in resistance of the ITO sensor was explained in terms of reduction reaction on the surface. Further, the sensor was controlled by Arduino, and the remote data acquisition was demonstrated.

본 연구에서는 Indium-Tin-Oxide 인쇄 박막의 원격 검출이 가능한 해양오염 방제용 센서로서의 응용 가능성에 대해 연구하였다. 우선 양질의 박막제작을 위한 바인더 비율, Indium-Tin-Oxide 중 주석 농도, 열처리 온도 등의 Indium-Tin-Oxide 인쇄박막 제작 조건을 최적화시켰다. 이를 이용하여 전기저항형 액체 센서를 제작하였고, 센서 동작을 확인하기 위하여 대기 중과 해수 중에서 저항 변화를 확인하였다. 이때 저항 변화의 원인은 전해질 속에서 표면에서 일어나는 환원반응에 의한 것으로 해석하였다. 또한 제작된 센서를 Arduino를 사용하여 작동시키고 취득한 데이터의 원격 검출이 가능함을 확인하였다.

Keywords

References

  1. E. B. Lee, J. H. Yun, and S. T. Chung, "A study on the development of the response resource model of hazardous and noxious substances based on the risks of marine accidents in Korea," Journal of Navigation and Port Research, vol. 36, no. 10, pp. 857-864, 2012. https://doi.org/10.5394/KINPR.2012.36.10.857
  2. ITOPF, "Response to Marine Chemical Incidents", 2014, Available: http://www.itopf.com/knowledge-resources/documents-guides/document/tip-17-response-to-marine-chemical-incidents/ Accessed February 20, 2016.
  3. V. S. Vaishnav, P. D. Patel, and N. G. Patel, "Preparation and characterization of indium tin oxide thin films for their application as gas sensors" Thin Solid Films vol. 487, no. 1-2, pp. 277-282, 2005. https://doi.org/10.1016/j.tsf.2005.01.079
  4. J. Blum, Exploring Arduino, California, U.S.A., A John wiley & sons, jnc., publication, 2013.
  5. J. H. Kang, K. M. Yu, S. O. Han, and K. W. Gu, "Precision measurement of silicon wafer resistivity using the four-point probe method," The Korea Institute Of Electrical Engineers, vol. 60, no. 7, pp. 389-391, 2010 (in Korea).
  6. S. M. Sze and K. K. Ng, Physics of Semiconductor Devices, John wiley & sons, 2006.
  7. J. Puetz and M. A. Aegerter, "Direct gravure printing of indium tin oxide nanoparticle patterns on polymer foils," Thin Solid Films, vol. 516, no. 14, pp. 4495-4501, 2008. https://doi.org/10.1016/j.tsf.2007.05.086
  8. A. Pasolini, "Zeoform: The eco-friendly building material of the future?", http://www.gizmag.com/zeoform-cellulose-water/28796/, Accessed August 29, 2013.
  9. I. G. Lee and B. H. Noh, "Effect of process variables and exisisting ions on highly active nano-sized ITO powders prepared by precipitation method," Journal of Korean Powder Metallurgy Institute, vol. 15, no. 6, pp. 450-457, 2008. https://doi.org/10.4150/KPMI.2008.15.6.450
  10. C. S. Rout, M. Hegde, A. Govindaraj, and C. N. R. Rao, "Ammonia sensors based on metal oxide nanostructures," IOP Science Nanotechnology, vol. 18, no. 20, p. 205502, 2008.
  11. N. G. Patel and B. H. Lashkari, "Conducting transparent indium-tin oxide films by post-deposition annealing in different humidity environments," Journal of Materials Science, vol. 27, no. 11, pp. 3026-3031, 1992. https://doi.org/10.1007/BF01154114
  12. K. K. Makhija, A. Ray, R. M. Patel, U. B. Trivedi, and H. N. Kapse, "Indium oxide thin film based ammonia gas and ethanol vapour sensor", Bulletin of Materials Science vol. 28, no. 1, pp. 9-17, 2005. https://doi.org/10.1007/BF02711165
  13. J. Koo, S. Park, W. Lee, Y. Cho, H. Lee, S. Lee, and J. Chang, "Room temperature operation of ITO nano-crystal gas sensor," Physica status solidi (c), vol. 10, no. 5, pp 873-876, 2013. https://doi.org/10.1002/pssc.201200617
  14. I. Shalish, L. Kronik, G. Segal, and Y. Shapira, "Grain-boundary-controlled transport in GaN layers," Physical Review B, vol, 61, no. 23, p. 245401, 2000.
  15. S. D. Herzee, J. C. Ramer, and K. J. Malloy, "The Microstructure of Metalorganic - Chemical - Vapor - Deposition GaN on Sapphire," Materials Research Society Bulletin, vol. 22, no. 7, pp. 45-51, 1997.