Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Coma Aberration Correction of Optical System by using a Robot Arm Type Coordinated Measuring Machine

로봇팔 타입 삼차원좌표측정기를 이용한 광학계의 비축수차 보정

  • Chun, Ho Bin (Department of Science of Measurement, University of Science and Technology) ;
  • Kim, Goeun (Department of Science of Measurement, University of Science and Technology) ;
  • Song, In-Woong (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Kang, Hyug-Mo (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Rhee, Hyug-Gyo (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Ghim, Young-Sik (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Yang, Ho-Soon (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Kwon, Jong Hoon (LG Innotek)
  • 전호빈 (과학기술연합대학원대학교 측정과학과) ;
  • 김고은 (과학기술연합대학원대학교 측정과학과) ;
  • 송인웅 (한국표준과학연구원 우주광학센터) ;
  • 강혁모 (한국표준과학연구원 우주광학센터) ;
  • 이혁교 (한국표준과학연구원 우주광학센터) ;
  • 김영식 (한국표준과학연구원 우주광학센터) ;
  • 양호순 (한국표준과학연구원 우주광학센터) ;
  • 권종훈 (LG이노텍)
  • Received : 2016.09.01
  • Accepted : 2016.09.21
  • Published : 2016.09.30
Download PDF
⟨ Previous Next ⟩

Abstract

Optical system needs to be aligned before its undergoing process, is usually shows coma aberrations, which occurred due to imperfection in the lens or other components results in off-axis point sources, appearing to have a tail like a comet. There are some methods to correct coma aberration. In this paper, to correct coma aberration in optical system, using a robot arm type coordinate measuring machine(CMM). CMMs are widely used to measure the form of accuracy of parts and positioning accuracy of systems. Among them, robot arm type CMM has more advantages than the others, such as its mobility and measuring range. However, robot arm type CMM has lower accuracy than cantilever type CMM. To prove robot arm type CMM's accuracy, several factors were suggested in this paper and the final measuring results were compared to a commercial cantilever type CMM. Based on this accuracy, a typical optical system was successfully aligned by using our robot arm type CMM.

Keywords

References

  1. Yunjong Kim, H.-S. Yang, J.-B. Song, S.-W. Kim, Y.-W. Lee, "Modeling alignment experiment errors for improved computer-aided alignment," Journal of the optical society of korea, Vol. 17, No. 6, pp. 525-532, 2013. https://doi.org/10.3807/JOSK.2013.17.6.525
  2. J. Liu, F. Long, and W. Zhang, "Study on computer-aided alignment method," Proc. SPIE 5638, pp. 674-681, 2005.
  3. D. C. Redding, N. Sigrist, J. Z. Lou, Y. Zhang, P. D. Atcheson, D. S. Acton, and W. L. Hayden, "Optical state estimation using wavefront data," Proc. SPIE 5523, pp. 212-224, 2004.
  4. S. Kim, H.-S. Yang, Y.-W. Lee, and S.-W. Kim, "Merit function regression method for efficient alignment control of two-mirror optical systems," Opt. Express 15, pp. 5059-5068, 2007. https://doi.org/10.1364/OE.15.005059
  5. S.P. Lee, H.J. Kang, and S.K. Ha, "An experimental study on the measurement performance of coordinate measuring machine," J. Kor. Soc. Pre. Eng., Vol. 26, No. 3, pp. 47-54, 2009.
  6. H.-G. Rhee, H.. Yang, I. Moon, Y.. Kim, Y. Lee, J. Bae, K. Park, and Y. Choi, "High quality EO/IR camera for an airborne application," Proc. of KSPE fall conference, pp. 541-542, 2011.
  7. Y. Koo, and D. Lee, "Development of a CAM system for mold machining using 3D measurement data," J. Kor. Soc. Mach. Tool Eng., Vol. 7, No. 4, pp. 79-88, 1998.
  8. J. Lee, Y. Lee, J. Choi, "Optical measuring instrument and its application for 3D coordinate measurement," J. KSME, Vol. 40, No. 5, pp. 65-68, 2000.
  9. ASME B89.4.22-2004, Methods for performance evaluation of articulated arm coordinate measuring machines (CMM), New York, 2004.
  10. https://optics.synopsys.com/codev/