Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Study on the Sensor Development for Liquid Contamination during Delivery

이송 중 액체오염 검출센서 개발에 관한 연구

  • 정이하 (한국기술교육대학교 디자인공학과) ;
  • 김병한 ((주)에스지엠) ;
  • 홍주표 (한국기술교육대학교 디자인공학과)
  • Received : 2016.06.07
  • Accepted : 2016.06.22
  • Published : 2016.06.30
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Abstract

Previously proposed contamination detecting sensor was revisited for the investigation of the liquid tendency. Experiments revealed different output voltages for several kinds of liquid input, but showed same values for various flow rates of each liquid. The transmittance of the liquid was measured, and it is well correlated with the voltages. Linearity in values and the compensation of the sensor to sensor deviation were tried to obtain. And, long term test was performed as attached at the manufacturing equipment in the field.

Keywords

References

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