한국표면공학회지 (Journal of Surface Science and Engineering)

  • 제49권1호
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  • Pages.104-109
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  • 2016
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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다공성 흑연의 기공내부로 침투하는 Si 증발입자의 확산

Diffusion of Si Vapor Infiltrating into Porous Graphite

  • 박장식 (한국과학기술정보연구원 리시트 프로그램) ;
  • 황정태 (제너코트)
  • 투고 : 2016.02.01
  • 심사 : 2016.02.24
  • 발행 : 2016.02.29
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초록

Graphite's thermal stability facilitates its widespread use as crucibles and molds in high temperatures processes. However, carbon atoms can be rather easily detached from pores and outer surfaces of the graphite due to the weak molecular force of the c axis of graphites. Detached carbon atoms are known to become a source of dust during fabrication processes, eventually lowering the effective yield of products. As an effort to reduce these problems of dust scattering, we have fabricated SiC composites by employing Si vapor infiltration method into the pores of graphites. In order to understand the diffusion process of the Si vapor infiltration, Si and C atomic percentages of fabricated SiC composites are carefully measured and the diffusion law is used to estimate the diffusion coefficient of Si vapor. A quadratic equation is obtained from the experimental results using the least square method. Diffusion coefficient of Si vapor is estimated using this quadratic equation. The result shows that the diffusion length obtained through the Si vapor infiltration method is about 10.7 times longer than that obtained using liquid Si and clearly demonstrates the usefulness of the present method.

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참고문헌

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