Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Effect of Si Content on the Phase Formation Behavior and Surface Properties of the Cr-Si-Al-N Coatings

Cr-Si-Al-N 코팅의 상형성 및 표면 물성에 미치는 Si 함량의 영향

  • Choi, Seon-A (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Hyung-Sun (Department of Materials Science and Engineering, Inha University) ;
  • Kim, Seong-Won (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sungmin (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Hyung-Tae (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Oh, Yoon-Suk (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
  • 최선아 (한국세라믹기술원 엔지니어링 세라믹 센터) ;
  • 김형순 (인하대학교 신소재공학과) ;
  • 김성원 (한국세라믹기술원 엔지니어링 세라믹 센터) ;
  • ;
  • 김형태 (한국세라믹기술원 엔지니어링 세라믹 센터) ;
  • 오윤석 (한국세라믹기술원 엔지니어링 세라믹 센터)
  • Received : 2016.12.02
  • Accepted : 2016.12.27
  • Published : 2016.12.31
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Abstract

Cr-Si-Al-N coating with different Si content were deposited by hybrid physical vapor deposition (PVD) method consisting of unbalanced magnetron (UBM) sputtering and arc ion plating (AIP). The deposition temperature was $300^{\circ}C$, and the gas ratio of $Ar/N_2$ were 9:1. The CrSi alloy and aluminum targets used for arc ion plating and sputtering process, respectively. Si content of the CrSi alloy targets were varied with 1 at%, 5 at%, and 10 at%. The phase analysis, composition and microstructural analysis performed using x-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) including energy dispersive spectroscopy (EDS), respectively. All of the coatings grown with textured CrN phase (200) plane. The thickness of the Cr-Si-Al-N films were measured about $2{\mu}m$. The friction coefficient and removal rate of films were measured by a ball-on-disk test under 20N load. The friction coefficient of all samples were 0.6 ~ 0.8. Among all of the samples, the removal rate of CrSiAlN (10 at% Si) film shows the lowest values, $4.827{\times}10^{-12}mm^3/Nm$. As increasing of Si contents of the CrSiAlN coatings, the hardness and elastic modulus of CrSiAlN coatings were increased. The morphology and composition of wear track of the films was examined by scanning electron microscopy (SEM) and energy dispersive spectroscopy, respectively. The surface energy of the films were obtained by measuring of contact angle of water drop. Among all of the samples, the CrSiAlN (10 at% Si) films shows the highest value of the surface energy, 41 N/m.

Keywords

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