Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effects of Debinding Atmosphere on Properties of Sintered Reaction-bonded Si3N4 Prepared by Tape Casting Method

  • Park, Ji-Sook (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sung-Min (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Han, Yoon-Soo (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Hae-Jin (Department of Materials Science and Engineering, Inha University) ;
  • Ryu, Sung-Soo (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
  • Received : 2016.09.07
  • Accepted : 2016.10.26
  • Published : 2016.11.30
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Abstract

The effects of the debinding atmosphere on the properties of sintered reaction-bonded $Si_3N_4$ (SRBSN) ceramics prepared by tape casting method were investigated. Si green tape was produced from Si slurry of Si powder, using 11.5 wt% polyvinyl butyral as the organic binder and 35 wt% dioctyl phthalate as the plasticizer. The debinding process was conducted in air and $N_2$ atmospheres at $400^{\circ}C$ for 4 h. The nitridation process of the debinded Si specimens was performed at $1450^{\circ}C$, followed by sintering at $1850^{\circ}C$ and 20 MPa. The results revealed that the debinding atmosphere had a significant effect on $Si_3N_4$ densification and thermal conductivity. Owing to the higher sintered density and larger grain size, the thermal conductivity of $Si_3N_4$ specimens debinded in air was higher than that of the samples debinded in $N_2$. Thus, debinding in air could be suitable for the manufacture of high-performance SRBSN substrates by tape casting.

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References

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