Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Chemical Vapor Deposition of Tantalum Carbide from TaCl5-C3H6-Ar-H2 System

  • Kim, Daejong (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) ;
  • Jeong, Sang Min (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) ;
  • Yoon, Soon Gil (Department of Materials Engineering, Chungnam National University) ;
  • Woo, Chang Hyun (Research and Development Division, Tokai Carbon Korea) ;
  • Kim, Joung Il (Research and Development Division, Tokai Carbon Korea) ;
  • Lee, Hyun-Geun (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) ;
  • Park, Ji Yeon (Nuclear Materials Development Division, Korea Atomic Energy Research Institute) ;
  • Kim, Weon-Ju (Nuclear Materials Development Division, Korea Atomic Energy Research Institute)
  • Received : 2016.07.25
  • Accepted : 2016.09.05
  • Published : 2016.11.30
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Abstract

Tantalum carbide, which is one of the ultra-high temperature ceramics, was deposited on graphite by low pressure chemical vapor deposition from a $TaCl_5-C_3H_6-Ar-H_2$ mixture. To maintain a constant $TaCl_5/C_3H_6$ ratio during the deposition process, $TaCl_5$ powders were continuously fed into the sublimation chamber using a screw-driven feeder. Sublimation behavior of $TaCl_5$ powder was measured by thermogravimetric analysis. TaC coatings have various phases such as $Ta+{\alpha}-Ta_2C$, ${\alpha}-Ta_2C+TaC_{1-x}$, and $TaC_{1-x}$ depending on the powder feeding methods, the $C_3H_6/TaCl_5$ ratio, and the deposition temperatures. Near-stoichiometric TaC was obtained by optimizing the deposition parameters. Phase compositions were analyzed by XRD, XPS, and Raman analysis.

Keywords

References

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