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Implementation of a 13.56 MHz 5kW RF Generator for ISM Band Applications

ISM 대역 응용분야에 사용되는 13.56 MHz 5kW RF 제너레이터 구현

  • Yoon, Young-Chul (Department of Electronic Engineering, Catholic Kwandong University) ;
  • Kim, Young (School of Electronic Engineering, Kumoh National Institute of Technology)
  • 윤영철 (가톨릭관동대학교 전자공학과) ;
  • 김영 (금오공과대학교 전자공학부)
  • Received : 2016.11.09
  • Accepted : 2016.12.21
  • Published : 2016.12.31

Abstract

This paper describes implementation of a 13.56 MHz, 5 kW RF high power generator for ISM band applications. This RF generator consists of four LDMOS modules of 1.25kW class-AB push-pull power amplifier with drive amplifier and its outputs are combined by using Wilkinson type transmission-line transformers. Its generator has a high efficiency and output power better than linearity. In order to discharge power transistor heats, we used on water cooled copper plate. Also, these have a composite circuit of combiner and low-pass filter and safety circuit to detector over and reflected power. The RF generator has achieved a efficiency of 79 % at 5.33 kW of saturated power level experimentally.

논문은 ISM 밴드 응용분야에 사용되는 13.35 MHz, 5 kW RF 제너레이터의 구현에 대한 내용이다. 이 제너레이터의 구성은 드라이브증폭기와 LDMOS 1.25 kW 트랜지스터를 클래스 AB 푸쉬풀 증폭기로 구현한 모듈을 바탕으로 4개의 모듈을 윌킨슨 형태의 전송선로 변환기를 이용하여 결합하는 구조를 갖고 있다. 이 제너레이터는 선형성보다는 높은 출력과 효율을 얻는 것이 중요하며, 트랜지스터에서 발생하는 열은 워터 쿨링에 의한 수냉식 방법을 선택하여 외부로 배출하였다. 또한, 결합기와 저역통과 필터의 결합 그리고 출력 및 반사 신호를 검출하는 보호회로를 삽입하였다. 이렇게 구현된 RF 제너레이터는 포화 전력레벨 5.33 kW 출력에서 79 %의 효율을 얻었다.

Keywords

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