한국표면공학회지 (Journal of Surface Science and Engineering)

  • 제48권5호
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  • Pages.205-210
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  • 2015
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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유도결합 플라즈마 파워가 NbN 코팅막의 미세구조, 결정구조 및 기계적 특성에 미치는 영향에 관한 연구

Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of NbN Coatings

  • 전성용 (목포대학교 신소재공학과)
  • Chun, Sung-Yong (Department of Advanced Materials Science and Engineering Mokpo National University)
  • 투고 : 2015.09.09
  • 심사 : 2015.10.13
  • 발행 : 2015.10.31
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초록

NbN coatings were prepared by ICP (inductively coupled plasma) assisted magnetron sputtering from a Nb metal target in $Ar+N_2$ atmosphere at various ICP powers. Effect of ICP on the microstructure, crystalline structure and mechanical properties of NbN coatings was investigated by field emission electron microscopy, X-ray diffraction, atomic force microscopy and nanoindentation measurements. The results show that ICP power has a significant influence on coating microstructure, structure and mechanical properties of NbN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Crystalline structure of NbN coatings were changed from cubic ${\delta}$-NbN to hexagonal ${\beta}-Nb_2N$ with increase of ICP power. The maximum nano hardness of 25.4 GPa with Ra roughness of 0.5 nm was obtained from the NbN coating sputtered at ICP power of 200 W.

키워드

참고문헌

  1. S. Y. Chun, S. C. Kim, J. Kor. Inst. Surf. Eng., 46 (2013) 261.
  2. H. H. Jin, J. W. Kim, K. H. Kim, and S. Y. Yoon, J. Kor. Ceram. Soc., 42 (2005) 88. https://doi.org/10.4191/KCERS.2005.42.2.088
  3. U. Diebold, Surf. Sci. Rep., 48 (2003) 53. https://doi.org/10.1016/S0167-5729(02)00100-0
  4. M. Aliofkhazraei, N. Ali, Comprehensive Materials Processing, 7 (2014) 49.
  5. A. S. H. Makhlouf, Nanocoatings and Ultra-Thin Films, Woodhead Publishing Limited, pp. 159-181 (2011).
  6. M. Lilja, K. Welch, M. Astrand, H. Engqvist, M.Stromme, J. Biomedical Mater. Res. B., 100 [4] 1078 (2012).
  7. Y. X. Leng, N. Huang, P. Yang, J. Y. Chen, H. Sun, J. Wang, G. J. Wan, X. B. Tian, R. K. Y. Fu, L. P. Wang, P. K. Chu," Surf. Coat. Technol., 156 (2002) 295. https://doi.org/10.1016/S0257-8972(02)00092-0
  8. Y. X. Leng , N. Huang , P. Yang , J. Y. Chen , H. Sun , J. Wang , G. J. Wan , Y. Leng , P. K. Chu, Thin Solid Films, 420-421 (2002) 408. https://doi.org/10.1016/S0040-6090(02)00814-3
  9. M. Bowes, J. W. Bradley, Surf. Coat. Technol., 250 (2014).
  10. J. Musil, J. Vlcek, Surf. Coat. Technol., 112 (1999) 162. https://doi.org/10.1016/S0257-8972(98)00748-8
  11. B. M. Koo, S. J. Jung, Y. H. Han, J. J. Lee, J. H. Joo, J. Kor. Inst. Surf. Eng., 37 (2004) 146.
  12. J. J. Lee, J. H. Joo, Surf. Coat. Technol., 169-170 (2003) 353. https://doi.org/10.1016/S0257-8972(03)00112-9
  13. G. S. Fox-Rabinovich, G. C. Weatherly, A. I. Dodonov, A. I. Kovalev, L. S. Shuster, S. C. Veldhuis, G. K. Dosbaev, D. L. Wainstein, M. S. Migranov, Surf. Coat. Technol., 177-178 (2004) 800. https://doi.org/10.1016/j.surfcoat.2003.05.004
  14. D. Cullity, S. R. Stock, Element of X-ray Diffraction, Prentice-Hall Inc., 3rd, pp. 167 (2001).
  15. N. Maazi, N. Rouag, J. Cryst. Growth, 243 (2002) 361. https://doi.org/10.1016/S0022-0248(02)01420-3
  16. A. Anders, "Atomic Scale Heating in Cathodic Arc Plasma Deposition,"Appl. Phys. Lett., 80 (2002) 1100. https://doi.org/10.1063/1.1448390
  17. M. Wen, Q.N. Meng, C.Q. Hu, T. An, Y.D. Su, W.X. Yu, W.T. Zheng, Surf. Coat. Technol., 203 (2009) 1702. https://doi.org/10.1016/j.surfcoat.2009.01.002
  18. C. S. Sandu, M. Benkahoul, M. Parlinska-Wojtan, R. Sanjines, F. Levy, Surf. Coat. Technol., 200 (2006) 6544. https://doi.org/10.1016/j.surfcoat.2005.11.054
  19. D. H. Seo, S. Y. Chun, J. Kor. Inst. Surf. Eng., 45 (2012) 123. https://doi.org/10.5695/JKISE.2012.45.3.123

피인용 문헌

  1. Properties of VN Coatings Deposited by ICP Assisted Sputtering: Effect of ICP Power vol.54, pp.1, 2017, https://doi.org/10.4191/kcers.2017.54.1.05
  2. Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings vol.49, pp.4, 2016, https://doi.org/10.5695/JKISE.2016.49.4.376