참고문헌
- H. S. Jeong, K. S. Kim , Y. J. Oh, T. J. Lho, H. C. Choi, T. Y. Son and B. S. Park, 2006, "Development of Nozzle Pressure Measurement System for Air-Floating FPD Conveyor Using LabVIEW," Proceeding of KSPE, pp. 363-364.
- T. G. Lee, J. S. Y, H. J. Jung, J. H. Kim and J. H. Kim, 2013, "Development of the Air Floating Conveyor System for the Large Glass Sheet," Journal of the Korean Society of Manufacturing Technology Engineers, Vol. 22, No. 4, pp. 635-642. https://doi.org/10.7735/ksmte.2013.22.4.635
- S. C. Hwang, D. H. Jeon and D. W. Lee, 2002, "The Couplings for ball-screw on high precision positioning," Proceeding of KSMTI, pp. 161-166.
- I. H. Moon and Y. K. Hwang, 2006, "Evaluation of a Wafer Transportation Speed for Propulsion Nozzle Array on Air Levitation System," Journal of the KSME, Vol. 30, No. 4, pp. 306-313.
- J. H. Hwang, C. H. Park, C. K. Song and J. C. Kim, 2000, "A Study on the Positioning Characteristic of Aerostatic Stage," Proceeding of KSPE, pp. 668-671.
- I. H. Moon, Y. K. Hwang, S. J. Cho and D. K. Kim, 2003, "A Study on the Effect of Friction Coefficient of Semiconductor Wafer Transportation for Air Levitation System," Proceeding of KSPE, p. 196.
- H. S. Chang, Y. J. Park, Y. S. Chang, J. B. Choi, Y. J. Kim, P. H. Chun and J. Y. Kong, 2006, "CFD Analysis for Concept Design of Air Levitation Transport System," Proceeding of KSPE, pp. 81-82.
- E. K. Lee, N. S. Kim, M. D. Dai and C. W. Kim, 2010, "FSI Analysis of Air-turn-Bar System in Roll-to-Roll Continues Process," Proceeding of KSPE, pp. 269-270.