Journal of the Korea Society for Simulation (한국시뮬레이션학회논문지)

The Korea Society for Simulation (한국시뮬레이션학회)
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Scheduling Start-up Transient Periods of Dual Armed Cluster Tools

양팔 클러스터장비의 초기 전이 기간 스케줄링

  • Received : 2015.03.16
  • Accepted : 2015.08.06
  • Published : 2015.09.30
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Abstract

A cluster tool used in many kinds of semiconductor processes for improving the performance and the quality of wafers has a simple configuration, but its schedule is not easy because of its parallel processing module, a lack of intermediate buffers, and time constraints. While there have been many studies on its schedule, most of them have focused on full cycles in which identical work cycles are repeated under constant task times. In this research, we suggest strategies of start-up transient scheduling which satisfies time constraints and converges into a desirable steady schedule for full work cycle. The proposed schedules are expected robust under the stationary stochastic task times. Finally, we show that the strategies make schedules enters the desirable steady schedule and robust using the simulation.

생산성과 웨이퍼의 품질을 향상하기 위해 다양한 공정에서 사용되는 클러스터 장비는 단순한 구성에도 불구하고 병렬 공정모듈, 중간버퍼의 부재, 시간 제약 때문에 스케줄이 쉽지 않다. 그래서 스케줄링에 대한 많은 연구가 진행되었지만 대부분 시간이 변동되지 않는다는 가정 하에서 주기별로 동일한 스케줄이 반복되는 안정 상태를 연구하였다. 본 연구에서는 시간 제약을 만족시키면서도 원하는 안정 상태의 스케줄로 안착할 수 있는 스케줄 전략을 제시한다. 제안된 스케줄 전략은 작업시간이 지속적으로 변동되는 상황에서도 강건하다. 마지막으로 이 전략들이 실제로 강건하고, 원하는 안정 상태로 갈 수 있다는 것을 보여주기 위하여 시뮬레이션을 수행한다.

Keywords

References

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